Based On A Reverse, The Second Is From The Implementation Of The Study Perception Piezoelectric Effect

In recent years, MEMS industry is developing rapidly in many fields. The fields ofscientific research and daily life have used a large amount of MEMS devices. In thenext few decades, MEMS devices will toward smaller volume, higher integration, lowerpower consumption, the direction of more features, it is expected to replace thetraditional mechanical and electrical system device in the electrical and mechanicalsystem, and lead to a smaller, lighter and more performance revolution of the device.At present, the research of piezoelectric self-sensing actuator still based on thetraditional piezoelectric effect theory. In the same piezoelectric crystal, make use ofdirect and inverse piezoelectric effect as the design principle of sensors actuators. Theresearch of self-sensing actuator is based on the first inverse and the secondary directpiezoelectric effect in this paper, it is the thorough study and enhancement on traditionalpositive and inverse piezoelectric effect, and has important theoretical significance andpractical value for the development of piezoelectric theory system and the integration ofsensors and actuators.This article has carried on the deep research in the theory of piezoelectricself-sensing actuator. On the basis of a theory of the inverse piezoelectric effect, furthertheoretical study of secondary piezoelectric effect provide theoretical basis for theapplication of piezoelectric self-sensing actuator. The experiment structure of firstinverse and secondary direct piezoelectric effect has been designed, and the experimentstudy which is based on piezoelectric ceramics complete the signal separation,extraction and decoupling in the process of Sensors and actuators Integration. Thisarticle proposed that piezoelectric self-sensing actuator based on first inverse andsecondary direct piezoelectric effect is applied to the field of micro flow control,experimental results verify the feasibility. On the basis of theoretical analysis and experimental research of piezoelectricceramic basic characteristics, this paper analyze the causes of nonlinearity, hysteresis,repeatability, provide theoretical basis to improve control accuracy of self-sensingpiezoelectric ceramic actuator.