Research On Silicon Phononic Crystal Plates Sensor With High Sensitivity Detection

As a new kind of artificial acoustic material,phononic crystals has excellent characteristics such as unique modulation effects for acoustic wave and defect modes. The study of band gap and point defect of phononic crystals has important significance. There is broad prospects of high sensitivity of resonant sensor using phononic crystals modulation effects. In this paper, we fabricate silicon phononic crystals sensor with point defects mode. And the selective issues in actual application are studied. We are mainly engaged in the work of the following areas:1. We calculate the energy band structures of phononic crystal plates with hexagonal lattice. The samples with point defects are obtained by MEMS process to study the frequency characteristics and vibration type of the point defects.2. To investigate the mass sensitivity of the point defect, we study the distribution of vibration energy to achieve the decoupling of position. We use three and eight modes to meet the different precision requirements of decoupling.3. Sheep IgG and the biotinylated magnetic beads are applied to the detection, we explore the appropriate reaction conditions and processes of pre-treatment. The formation of a more reasonable gradient function of the sensor surface is possible.4. Surface functionalization of the phononic crystal plates achieves the amplification and labeling effect of antibody(or antigen) using magnetic beads. We obtain the screen function at the surface of the point defect, it has the potential in detection applications.The results can provide valuable methods for the phononic crystals applied in the acoustic sensing for the performance of the acoustic wave sensing.