DC Arc Ion Source And Development Of Control Device

With the rapid development of arc ion plating technique, arc ion plating technique has gradually displaced all sorts of other ion plating. This kind of technique can increase ionization rate of target, energy of target ion and speed of deposit, besides target can be installed in any positions of vacuum chamer. Thus, the arc ion plating technique prevails in industry and it is widely used in molds, steel pipes, stain-less steel sheets, lighting equipments, decorative materials and hardware. Moreover, materials of film have developedd into TiCN, TiAlN, CrN from TiN and have further developed into multi-layer composite films. Therefore, the study of this technique has economic value.Based on the principle of DC arc ion plating, this thesis designs a new kind of DC arc ion source which include cooling water system, arc electrode component and baseboard of target. The design of cooling water system can extremely cool target, sealing components and insulaing materials, can decrease the temperature of target and absorb the heat from surface of target in time. The design of arc electrode component consists of arc-ignited contact holder, arc-ignited base and arc-ignited ceramic tube. According to the design, the thesis draws mechanical parts and processes them. The design uses the software of ansys to simulate magnetic field. On the base of simulation, the design of magnetic field is completed.In addition, this thesis designs an automatic control device which include high voltage pulse power based on IGBT, IGBT driving circuit, PWM pulse-generating circuit, current signal of main power detection and acquisition circuit. The automatic control device can monitor the condition of arc-discharging. Once arc is extinguishing, the device is able to automatically ignite arc again until the condition of arc-ischarging becomes stable. It can also acquire current signal of main power and calculate thickness of film according to current signal. After a theoretical validation, schematic design and device debuging, the design of control device is basically completed.