Development Of The Design Software Of Ultra-precision Vibration Isolation System Based On Model Library

Ultra‐precision vibration isolation system (UVIs) is the guarantee for the generation of nano‐precision in ultra‐precision manufacturing and metrology equipment. In order to satisfy the need of rapid development of UVIS, existing design experience and data should be accumulated and reused. So it is important to develop the design software of UIVS to realize the automated design, modeling and simulation through model reuse.The requirements of UVIS has been analyzed, a combination of active and passive mode is used to meet the complex requirements of vibration isolation and positioning. Typical passive active components such as air spring and voice coil motor, etc. are analyzed and their mathematic model was built. Besides, the control system is analyzed in detail, vertical and horizontal positioning control is achieved through relative displacement feedback and vibration control is achieved by absolute velocity feedback.The mechanism of model reuse is employed to realize rapid design of UVIS and the reusability of the vibration system model and its implementation method is discussed. Dynamic models of typical components, control algorithms and the simulation model of vibration isolation components are built using the object‐oriented and narrative modelinglanguage Modelica. The model library of UVIS is established as the basis of rapid modeling and simulation.A Software platform is designed based on C++Builder. This platform abstracts and encapsulates the model library using object-oriented method, presenting a friendly interaction form for users. Users can realize the design of vibration system configuration, optimization design of the isolators, and the modification and replacement of the basic models by simple operations. The software platform builds the dynamic model of vibration isolation system in an automated way through the command stream scripts in Mworks, increasing the efficiency. The design of a certain vibration isolation system is realized through software operation, verifying the effectiveness of the software based design of vibration system. And the accuracy of the model is verified through the comparison of simulation and experiments. The model library designed has open interfaces and can be expanded and improved through the use of the software platform, providing a basis for follow‐up work.