| The work in this paper is derived from the requirements of the International Astronomical Observation Program for the vibration isolation protection of the lens polishing process of the new-generation astronomical telescope(Thirty Telescope-Tep Telescope Project),and completed the process of design and development of the vibration isolation scheme that the team is responsible for.The main work is to study and integrate the passive vibration isolation platform with air spring as the vibration isolation support,and apply it to the vibration isolation design of the lens polishing process equipment.The modeling,analysis and actual measurement of the equipment-vibration isolation platform show that this solution Reduced the vibration response of the road traffic operation around the laboratory to this precision instrument,so that the control accuracy of the polishing process meets the expected requirements,including:(1)Design and integrate a passive vibration isolation platform for TMT lens polishing process equipment,analyze and formulate vibration isolation schemes and device selection,and verify the rationality of the early selection and design concept of the air spring of the vibration isolation platform through actual measurement to confirm the isolation Vibration isolation index of the vibration platform.(2)Compare and integrate the domestic and foreign mainstream precision instrument environmental vibration evaluation standards,and formulate vibration standards for this project.Analyze and measure the environmental vibration in the laboratory of the TMT lens polishing process equipment,the surrounding road traffic operation and the surrounding factory operations,and compare the measured speed data measured at different measurement points to find the natural vibration of the TMT lens polishing KUKA robot arm The frequency is in the range of 7 ? 20 Hz,which is a superior frequency band for highway trafficvibration,which generates resonance and amplifies the vibration response of the equipment.The analysis determined that traffic vibration is the main vibration source that affects the normal operation of the TMT lens polishing process equipment.At the same time,it is found that the smoothness of the road outside the laboratory,the speed of the vehicle and the weight of the car body passing through the road are the influencing factors of the vibration response amplification.Through reliability consideration and vibration isolation target evaluation,it is determined to adopt passive vibration isolation technology as the vibration isolation measures to reduce the vibration generated by highway traffic operation.(3)According to the modal test and analysis results of the lens polishing process equipment,the equipment-vibration isolation platform integrated numerical analysis model is established,the parameter identification and correction of the numerical model is carried out,and a high degree of agreement with the dynamic behavior of the measured object is established.Numerical analysis model.The vibration response of precision instruments before and after vibration isolation under different traffic operation conditions was analyzed,and the vibration conditions with greater sensitivity to polishing fineness were analyzed.It was found that through the implementation of this vibration isolation technology,the KUKA machine with TMT lens polishing process equipment was installed The horizontal and vertical vibration speed level of the control point of the arm working end is based on the universal vibration isolation standard(VC standard)established based on the frequency domain of one-third octave from the Office(ISO)level to VC-C Level,based on vibration time domain analysis,the peak vibration speed of the control point in the horizontal and vertical directions is reduced from 1.601mm/s and 2.787mm/s to less than 0.8mm/s,which improves the polishing accuracy of the lenses made by the TMT lens polishing process equipment.The vibration effect is good. |
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