Design And Research Of A Precision Flatness Measurement Device For Miniature Parts

Inertial navigation hydrostatic bearing and aerostatic air flotation cushion possess features of high accuracy and its machining error is difficult to detect. If the size of component is small and the flatness is less than 1μm it shall be difficult for common parallel plate to conduct quantitative detection. Micro part flatness fine detect is able to carry out small size part measuring based on contourograph, super precision detect and step profiler, it is expensive. What’s more, a glittering array of surveying instrument is introduced from abroad with high engineering application cost which cannot be widely promoted. To further innovate and research on the high-accuracy flatness of micro parts has profound meanings for the industrial development.This paper designs a device to test the high-accuracy flatness of micro parts, which can realize high-accuracy survey in the premises of meeting low processing cost so as to provide a convenient and simple mean. The device adopts the two-dimensional flexible guide mechanism as the surface measurement standard. It uses micrometer power table to realize two-dimensional scanning movement, tests and analyzes the guiding precision of guiding mechanism in x, y directions, and uses LVDT sensor, combined with AD689, to design a one-dimensional probe. The inductive probes which have adjustable force will measure flatness height variations. Standard optical flat will be adopted to demarcate the designed flatness measuring devices within the range of 10mm×10mm, and least square method is adopted for flatness evaluation. The uncertainty of measurement tested by the designed device is 0.644μm.