Research On Vibration Error Compensation Technology Of The High Precision Positioning Platform

With the further development of nanometer lithography, MEMS package, ultra precision machining, micro-electronic engineering, biomedical engineering, the positioning accuracy of the positioning platform requirements are also getting higher and higher, the development of positioning system will also promote the development of ultra precision machining, precision measurement and large scale integrated circuit industry. Vibration is one of the main factors affecting the positioning accuracy of the positioning platform, to further improve the positioning precision of the platform, in this paper, according to the vibration characteristics of aerostatic positioning stage driven by linear motor, focusing on the mechanism of effect of vibration on the positioning accuracy. Through the design of vibration error compensation mechanism, active control the positioning platform error caused by the vibration of the positioning platform, by experiment, the realization of the high precision positioning platform.Aiming at the high precision and high dynamic motion characteristics of the positioning platform, much work should be done to complete the design of the overall structure of the positioning platform. Based on the vibration characteristics of the internal source, establish the physical and mathematical model of the vibration of X, Y, Z three direction, and calculate the natural frequency. And the establishment of the electromechanical coupling mathematical model of positioning platform, through the use of PID control and minimum beat control method to complete the positioning system step simulation analysis. To verify the positioning platform is capable of high speed reciprocating motion of the smooth start and stop.According to the vibration characteristics of the positioning platform, the design of piezoelectric ceramic(PZT) based on direct drive the double parallel plate elastic hinge of vibration compensation mechanism. Through the finite element simulation analysis, the dynamic and static characteristics of vibration compensation mechanism will be researched, and the final determination of the size of the parallel plate hinge. The design of feed forward-PID controller is to improve the positioning accuracy which driven by piezoelectric ceramic, and study on the micro control system simulation of tracking dynamic response.The establishment of precision positioning system based on error compensation, and the experimental study of vibration compensation platform and verified to satisfy the design index of this paper. Through the vibration error compensation experiment, to verify the high precision positioning system based on error compensation can realize high precision positioning.