The Simulation And Analysis On The Temperature Effects Of The MEMS Torsional Micromirror

MEMS torsional micromirror is an optical MEMS device developed with MEMS technology.It has been widely used in the research fields of modern optical communication，projectiondisplay，spectrometer and so on. The static and dynamic characteristics of MEMS micromirrorusually under the influence of ambient temperature while in the practical application. Throughdifferent models of statics and dynamics characteristics of the MEMS micromirror，the followingresearch work has been done:1) Based on static characteristic analytical model of electrostatic-force-driving torsionalmicromirror，numerical simulation and analysis have been carried out on how the staticcharacteristics of torsioanl micromirror with different materials and sizes，affected by differenttemperature；And the pull-in angle of MEMS torsional micromirror is studied through a method ofcomparing the electrostatic torque vs. tilt angle and mechanical torque vs. tilt angle. The influent ofseries capacitor on pull-in angle is analyzed numerically and analytically，on the premise ofkeeping the size parameters of MEMS torsional micromirror.2) Adopting the facts of the young’s modulus，the shear modulus，as well as the air squeezefilm damping coefficient changes with temperature，the trends of dynamic characteristics of atorsional micromirror affected by temperature are analyzed through numerical simulation mothod，based on torsion and bending model. In addition，the model reference adaptive control method isimplemented on MEMS torsional micromirror，in order to compensate the influence of thetemperature on the dynamic characteristics，or improve the robustness on the temperature for thedynamic characteristics.The research conclusions provided by the study benefits the user on the application of MEMStorsional micromirror，especially on how to reduce the temperature effects on MEMS torsionalmicromirror in the practical application.