Design Of Wafer Transfer Robot Controller

Integrated circuit(IC) industry is the core of electronic information industry,and has an extremely important strategic position. Wafer transfer robot, which isused to transport the wafer fast and accurately, is an indispensable component on theIC industrial line. The control system of wafer transfer robot is the necessaryrequirement of the wafer transfer robot to complete its work, and just plays animportant role in wafer transmission. In this paper, aimming at a fast, stable andreliable characteristics of the wafer transfer robot, combined with highly integratedcontrol system requirements, author has developed a dedicated wafer transfer robotmotion controller.First of all, analysis the functional requirements of the wafer transfer robotcontrol system, use the PID add feedforward strategy in this premise, select thecontrol system component, and choose the special motion control chip combinedwith FPGA chip development motion control card as a hardware implementation.Secondly, designed a motion control board hardware circuit, including theserial communication module, parallel communication module, incremental encodermodules, the DAC output module, the absolute encoder module. Designed motioncontrol card with a high level of integration, and design external IO interface boardthat makes the hardware part of the whole control system is embedded inside therobot body, providing a reliable hardware base.Used VHDL to achieve initial configuration of the dedicated motion controller,PC104bus communication, DAC output, and absolute encoder signal receivingfunction. For the actual working conditions of the wafer transfer robot, did thestation analysis, path and trajectory planning, preparate a full-featured deguggingsoftware of wafer transfer robot with VC++language.Finally, established the experimental system and did the functional experimentsof serial communication module, parallel communication module, incrementalencoder modules, the DAC output module, the absolute encoder module. Set upexperimental platform and test the single axial debugging experiment and biaxialinterpolation experiment. The results show that the dedicated motion controllerfulfilled the rapid and smooth control requirements.