Manufacture Method Research Of Milling 3D Microstructure On Pre-sintering Ceramics

Ceramic materials have become widely used and requirements in micro mechanical field because of its wonderful operational performance. But ceramic material is very difficult to process, especially micro-machining technology of ceramic material. In this paper, micro milling technology of ceramic green body has been deeply studied, especially in processing 3D micro-features.Six kinds of different strengths of ceramic green compacts are prepared, and analysis its microstructure of the cross section combined with sintering mechanism, discusses the force condition of the body in the process of milling. Through the micro hole drilling experiment, we found when ceramic was machined in cutting fluid, not only can get smaller and stable machining gap, guarantee the dimensional accuracy; And the edge quality of the microporous is good.This paper comprehensive analyzed the influence of various factors on the dimensional accuracy of the microstructure. thermal expansion, repeatability positioning accuracy of machining, machining precision of cutting tool, and precision machine tool movement is the secondary factor which affect the dimensional accuracy of the X?Y direction of microstructure. The main factors is the machining gap. the dimensional accuracy of Z related to the degree of tool wear. In this paper, combined with the machining experiment of micro cavity, analyzes the machining gap effect on the dimensional accuracy of X? Y, determined the effect law of processing parameters (such as green strength, milling thickness, milling depth) on the machining gap of microstructure. The experimental results show that with the green strength increase, the machining gap quickly decreases and then again increases, there has a optimal range from 7-10MPa. Besides we verified the consistency of machining gap, found that the machining gap has nothing to do with size of microstructure.In this paper, we adopt the method that reverse design the size of microstructure to compensate the machining gap, processing results show that the absolute difference of the feature sizes are within 2.5?m; Real-time detection method is used to compensate for the size error of Z, which was caused by tool axial wear, and absolute deviation is not more than 3?m. These two kinds of compensation method can significantly improve the processing dimensional accuracy of microstructure.In this paper, the effect of machining parameters that include cutting fluid system, the strength of body, the milling layer thickness on the machining quality of microstructure is studied. The results show that the surface of microstrcture is more clear, almost no residual chip after add cutting fluid; If considering the edge quality and processing efficiency, body strength by about 9 MPa, milling layer thickness to 5?m.In this paper, through experiments under different milling thickness combination, found gap is small and steady under thick multilayer composite processing machining, and microstructure has a better edge quality at the same time, and its processing time is greatly reduced, efficiency improved significantly. Study the feasibility of arcuate structure processing, considering the processing efficiency and arc structure integrity, determined the suitable processing parameters of arc structure.Finally overall considering dimensional accuracy, surface quality and processing efficiency and processing conditions of arc structure, optimize the processing parameters and selecte the reasonable design process, several 3D micro-structures were generated successfully with high quality and dimensional errors less than 5?m.