Growth, Transfer And Characterization Of Large Single Crystals Graphene

Graphene is the first two-dimensional material found in the experiments, because of its unique excellent performance, it quickly leads to extensive research boom. Wherein graphene growth is the most important point of research, the growth of large-area graphene and a large single crystal growth are the keys, the transfer of graphene is the difficulty of research. In this paper, by chemical vapor deposition method, Raman spectroscopy, FET measurement technology, and the system of LPCVD(low pressure chemical vapor deposition) to control the graphene growth conditions, the growth of graphene, graphene transfer method and electrical characterization of graphene are researched, the major result are as follows:Graphene single crystal growth by introducing argon in the annealing stage and the growth stage, reducing the graphene nucleation density, increasing the size of a single crystal of graphene, and the first introduction of oxygen plasma pretreatment of the copper box, greatly reducing the graphene nucleation density, increasing the size of a single crystal, achieve 4 mm size of large single crystals of graphene.Transfer graphene, the plastics polyethylene terephthalate(PET) is introduced as an auxiliary frame in the transfer process to ensure the integrity against external factors graphene, and compared to traditional methods of transfer, PET auxiliary graphene transfer get better integrity.Electrical characterization of graphene, by measuring the Hall FET and then conductance method and fitting method are applied to extract the mobility of graphene, we have also measured the magnetic fields Hall FET transmission curves to extracte graphene mobility in the magnetic field.