Study On The Rapid Thermal Cycling Of Micro Hot Mold Based On Graphene Coating

In recent years,the demand for micro-products and micro-parts is substantial increasing in electronics,optics,medical,biological and other fields,micro-structure processing technology has rapid development to meet the requirements of product miniaturization.Micro-hot-pressing method has been widely used in microstructure processing.At present,the main constraints of micro-hot-pressing large-scale production is the hot-press cycle time,it's usually 10 minutes or longer.In-depth study of mold temperature technology become the urgent need for achieving rapid cooling of the mold cooling,and shorten the cycle time effectively.In this study,according to the property of new material graphene coating that is high thermal conductivity,electric conductivity,and low surface roughness characteristics,design a new method of improving traditional micro-hot effectiveness,coat graphene layer on the microstructure of the mold surface,study temperature effect of graphene layer,try to achieve rapid heating and cooling on mold surface.In this study,the main research contents of rapid cycling in hot embossing are as follows:1.Select the silicon as mold material,design dense micro-flow channel structure.The graphene layer is deposited on the surface of the silicon mold by chemical vapor deposition(CVD).After that,do light test,Raman spectroscopy test on graphene coating,observe the quality of layer processing.Simulate temperature characteristics of graphene coating on silicon mold.The simulation shows that the temperature rising rate of the graphene coating are related to the voltage and the thickness of the coating.The higher the voltage,the thicker the coating and the faster the heating rate.2.Set up micro-hot mold thermal cycle experimental device,including high-power DC supply,temperature acquisition device,silicon mold,thermocouple.Study temperature uniformity and temperature characteristics of the mold.Measure the uniformity of the surface temperature distribution of the silicon wafer by the portable infrared camera EA20IR.The effects of the graphene coating on the heating results are compared with those of the graphene-free and graphene-coated silicon molds.3.Analyze the rheological mechanism of the polymer material,the relationship between the properties of the material,the temperature and time.Select appropriate polymer numerical simulation model,simulate the polymer flow by DEFORM 2D.Simplify the symmetrical structure and analyze the duty ratio.Analyze pressure,stress,strain,flow velocity,polymer sheet thickness and so on with the micro-hot forming changes.4.Set up a rapid thermal cycle micro-hot test bench,design four factors three horizontal orthogonal test,hot pressing temperature is set to 110 ?,120 ?,130 0?,the voltage level is set to 40V,50V,60V,hot press motor output Is set to 5%,10%,15%,and the size(pitch/width)is set to 80?m,110?m,and 140?m.Study the influence of each influencing factor on micro-fabrication.This study design to improve the traditional micro-hot pressing method,to achieve rapid heating and cooling in micro-hot pressing.The development of this new microstructure processing method is of great significance to the study of the shortening of the micro-hot cycle time.