Electrochemical Micro Machining With Fiber Laser Masking On Stainless Steel

With the rapid development of micro electro mechanical system(MEMS),the demands of micro metal parts have become more and more,especially metal parts with micro size between 100nm~1mm.How to realize the fast fabrication of micro parts is one of the technical problems to many scholars at home and abroad.In this paper,through the combination of laser surface modification and EMM technology,EMM with fiber laser masking technology is put forward.First,laser beam of high energy density scans the surface of 304 stainless steel to produce masking layer,which possesses corrosion protection properties.Second,the surface of stainless steel with masking pattern is etched by EMM.Since the corrosion protection properties of laser masking layer,the localized machining can be realized during EMM.So the fabrication of the micro electrode can be avoided and the localization problem of EMM can be solved.The mechanism of EMM with fiber laser masking technology was studied.Through analysis of X ray photo-electron spectrum,X ray diffraction and polarization curve of laser masking layer,there is the oxide film on the surface of 304 stainless steel.The oxide films have excellent corrosion resistance properties,the masking effect in EMM lead to the selective etching on the surface of 304 stainless steel,and micro structures can be fabricated.A new device of EMM with fiber laser masking technology was developed.The effects of different processing parameters on the machining efficiency,such as laser power,machining voltage,duty cycle and electrolyte concentration,were studied.By optimizing the processing conditions and parameters,several EMM with laser masking were used to realize machining of micro parts with high efficiency and low cost without lithography,and some samples with a depth of about 30?m were fabricated by EMM with laser masking.