Research Of Magnetron Sputtered W(Al)N And AlCN/WN Coatings

The coatings prepared by magnetron sputtering equipments have been widely used in mechanical machining and aerospace components,due to the ingredients/controllable structure,good compactness and high bond strength between coatings and substrates.In order to clear the coatings how to adapt to the extreme work environment,it is necessary to investigate the mechanical property and the friction and wear perfomance.A series of AlN and WN coatings with different preparation parameters,a series of WAlN coatings with different Al content,a series of AlCN/WN mutilayers with different modulation periods were prepared by magnetron sputtering.The microstructures,mechanical properties,friction and wear properties were measured by XRD,EDS,SEM,HRTEM,nanoindentation and high temperature friction and wear equipment.The mechanism of high hardness were discussed in this study.For AlN coating,with the increase of Al target power,the grain size and hardness?20²3 GPa?increase first and then decrease.With the increase of N₂ flow rate,the coatings grow with the?002?preferention.The deposition rate decreases gradually.The hardness first increases and then decreases.For WN coating,with the increase of N₂ flow rate,the deposition rate decreases gradually and the N₂ flow rate has an obvious effect on the structure.The hardness first increases and then decreases gradually.For W?Al?N coating,W?Al?N coatings consist of a mixture of fcc-W?Al?N and h-AlN phases.The preferred orientation changes from?111?to?200?.The hardness first increases and then decreases with the Al content increasing.Compared to WN,the W?Al?N coatings show better oxidation resistance because of the formation of dense Al₂O₃ oxide layer.For AlCN/WN coating,the hardness is high than the value calculated from the rule of mixtures.At 600°C,the friction coefficient of AlCN/WCN is lower than AlCN and the wear rate is higher than AlCN,due to the formation of WO₃.