Study On The Structure And Properties Of TiN-MoS₂ Coating Prepared By Magnetron Sputtering

In this paper,the advantages of hard phase and soft lubrication phase were exploited.TiN,TiN-MoS₂ composite coating and the TiN/MoS₂ multilayer coatings.TiN,TiN-MoS₂ composite coating and TiN/MoS₂ multilayer coating were prepared by magnetron sputtering.The samples were discovered and analyzed by a series of testing equipment,such as X-ray diffraction,scanning electron microscopy,SEM,nano mechanics test system,the friction and wear testing machine,etc.,to obtain the coating composition,microstructure,mechanical properties,adhesion and friction performanceThe TiN coating prepared by direct sputtering of the TiN target had a higher hardness and modulus of elasticity than the sputtered Ti target,reaching 11.7 GPa and227.6 GPa.TiN and MoS₂ were co-deposited to obtain a TiN-MoS₂ composite coating,in which TiN was a fcc structure,and MoS₂ was present in the coating in an amorphous state.As the MoS₂ target power increased,the MoS₂ content increased,the coating grains were refined,and the preferred orientation was changed from(111)to(200),and the columnar structure was refined and compacted.The hardness and elastic modulus first increased and then decreased.When the sputtering power of MoS₂ was 40W,the maximum value of hardness and elastic modulus was 22.1 GPa and 389.6 GPa,respectively.MoS₂ acted as a lubricating phase to improve the friction properties of the coating.When the MoS₂ power was 60W,the friction coefficient and wear rate are the lowest,which were 0.17 and 7.84×10^-8mm³/Nm,respectively.A TiN/MoS₂ multilayer coating was prepared.The modulation ratio of the TiN layer to the MoS₂ layer was 5:1,and the modulation period was 12 nm.The TiN in the coating was a fcc structure,and a small amount of MoS₂ still existed in an amorphous state.Changing the substrate bias,increasing the bias from the-0V substrate to-80V,made the grain refinement and the columnar structure more fine and dense.After increasing the substrate bias,the multilayer coating hardness was increased to 19.0 GPa,and the friction coefficient and wear rate were reduced to 0.22 and 4.0 x 10^-8mm³/Nm.The wear mechanism changed from severe abrasive wear to slight adhesive wear.It was a result of the enhancement of hardness,toughness of the coating,and the adhesion of the film base of the substrate inhibited the initiation and propagation of cracks in the dry friction test,thereby improving the friction and wear properties.