| Since scanning probe microscope(SPM) was invented, it has been widely used in many fields such as biology, chemistry, physics, materials, and so on. In SPM family, atomic force microscope(AFM) shows enormous potential in critical dimension(CD) measurement of semiconductor industry because of its non-destructive testing and high resolution imaging capability. But conventional AFM's low scanning speed limits its industrial applications. On the other hand, as the technology node of integrated circuit(IC) is getting smaller and the structure of IC is getting complex, there is pressing need to develop testing equipment with three-dimensional imaging capability. According to the characteristic of industrial testing equipment, the project develops a new SPM system, which has characteristics of fast scanning, three-dimension metrology, quick and non-destructive needle insertion and automatic needle replacement.The thesis is mainly concentrated on the electronic control system's hardware and embedded software design of the SPM. In addition, several experiments about sidewall imaging were implemented. The main content of the thesis include:1. An introduction to the development of SPM and the principle of AFM, with an emphasis on development of CD-AFM which is used in semiconductor industry.2. The overall design of industrial SPM is introduced, including the whole structure design, optic system design, tip holder design and the electronic control system framework.3. Hardware design of the electronic control system, including minimum FPGA system, Ethernet communication module, QPD signal processing circuit,motor control module, the driver circuit of tip-holder and analog lock-in amplifier.4. Embedded software design of corresponding hardware, including embedded TCP/IP implementation, control software of motor and DDS.5. Do some experiment about sidewall scanning, including transverse sensitivity calibration and torsion resonance experiment, then scans a line of the sidewall. |
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