Development And Application Research Of High Frequency Ultrasound Compound Scanning Probe Microscope

Nanoscale ultra-high resolution microscopic imaging is an important means of nanoscale structures and properties testing, especially the microscopic imaging instrument which can simultaneously characterize of the surface and internal nanometer structure information of science samples and industrial products, playing a crucial role in the basic research and application engineering field, such as material, medicine, biological engineering, nano manufacturing and so on. In this thesis, combined with the characteristics of ultrasonic, we developed a new type of microscopic imaging technology on the basis of the scanning probe microscope: high frequency compound ultrasonic scanning probe microscope, and it can acquire nondestructive internal nano structures acoustic images as well as the morphology images. First, we designed kinds of standard calibrations and samples to identify its commonly used technical parameters, the measured horizontal resolution and vertical resolution 0.13 nm, the spatial positioning precision 0.13 nm, the maximum scan range 105?m x 105?m, the internal ultrasonic image resolution less than 50 nm and detection depth more than 100?m. In addition, we further designed kinds of samples in different areas, analyzed the obtained samples images and established the corresponding sample databases, providing the experimental data for the instrument research and application later on. As an important measuring instrument, high frequency compound ultrasonic scanning probe microscope is the important tool of nanoscale structures and properties testing, and having an important scientific significance and application value in the physical material, nanometer material, life science and other fields.