The Design Of MFC Valve Signal Generation And Control System Based On LabVIEW Software

Mass Flow Controller accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. Which is widely applied in the fields as semiconductor and IC fabrication, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The adjustment range, precision production debugging and technical level of the solenoid valve have the important influence to the range, accuracy, linearity, response time and the technical parameters of the MFC. This paper firstly elaborated the working principle, structure and parameters of the MFC and the solenoid valve, and then expounds the solenoid valve technological status both in China and abroad and the Lab VIEW software platform has a widely application in the MFC production process control. The pater also elaborated the advantages of the application of Lab VIEW software platform used in the solenoid valve debugging technology, introduced the whole design of the hardware and software system. Describes the measuring principle of the solenoid valve system debugging, the software is divided into four parts according to the function, which is parameter configuration, data acquisition, data processing and data report. The final completion of the all the software function in the version 2012 Lab VIEW software platform. In the end of the paper discussed the results, problems and solutions.The project finally completed all the designs, the system can be used in all the test and adjustment of the solenoid valve, all the results as the process data is automatically saved and reported. Currently the system has been applied in the actual production, and play an important role to improve the mass flow controller product process debugging efficiency and effective error proofing, reduce the repair rate, improve the response time.