Study On The Nanopositioning Stage With Millimeter Range Based On Pan-style Piezomotor

Precision positioning technology is one of the key technologies of micro research field,the development level of it directly affects the development level of micro field technology.Among the precision positioning technology,the development of micro-range precision positioning technology is relatively mature,but because the large-range precision positioning technology has larger positioning range which makes its application more widely,so the large-range precision positioning technology has more research significance.This thesis aims to build a two-dimension nanometer positioning stage with millimeter range based on Pan-style piezoelectric motor,it's positioning range can achieve millimeter and positioning precision can achieve nanometer.This thesis analyzes the present research status of domestic and international on the micro-range precision positioning technology and the large-range precision positioning technology.The step principle of Pan-style piezoelectric motor is described,the mechanical structure o f two-dimension nanometer positioning stage with millimeter range based on the step principle is designed.The DC amplifier voltage drive method of piezoelectric ceramics are introduced,The piezoelectric voltage amplification circuit based on the OP07 and PA85 amplifier chip is designed.The MFC software is compiled by VC++ to realize the voltage programmable control of the ADLINK PCI 6216 V analog output card output and the data of the Agilent N1231 B laser interferometer measurement card can be read and saved.The micro-displacement measurement system is designed based on the measuring principle of heterodyne laser interferometer,combining the piezoelectric voltage amplification circuit and the MFC software to build the displacement measurement and control system of piezoelectric ceramic and nanometer positioning stage.The piezoelectric nonlinearity correction method based on the polynomial fitting and interpolation fitting is proposed.The performance of nanometer positioning stage is verified.In order to verify the mechanical structure of the nanometer positioning stage,the piezoelectric voltage amplifying circuit,the MFC software and the nonlinear correction method of the piezoelectric ceramics,the each part and the whole performance of the nanometer displacement stage are simulated or experimentally,some experiments were conducted as follows:(1)the simulation analysis of the smooth support block design and magnetic base design.The simulation analysis results indicate that the nanometer positioning stage use quartz window mirror as smooth support block is more stabilization than using the quartz flat convex lens as smooth support block.The results also indicate that the magnetic base design make the magnetic force of the magnet enhancement.(2)the circuit noise and voltage step response experiment.The results show that the maximum circuit noise of the piezoelectric voltage amplification circuit is 66 mV,the noise will cause the 0.7 nm displacement fluctuation which can meet the nanometer positioning precision.The maximum voltage step response time is 40 ?s which can meet the nanometer positioning stage frequency requirement.(3)the experiment of the MFC software,the result shows the MFC software can meet the displacement step required voltage signal of the nanometer positioning stage.(4)the test of the hysteresis,nonlinearity and creep of piezoelectric ceramic stack and the nonlinear correction experiment,the experiment verify that the nonlinear correction method can reduce the 89% of the nonlinear errors.(5)The measuring stability of the displacement measurement and control system device of the nanometer positioning stage is tested,the test results show that the X dimension measuring stability of the device is ±10 nm,the Y dimension measuring stability is ±25 nm.(6)Then experiments of the nanometer positioning stage,the experimental results show that the single step will have a displacement loss of about 100 nm,the displacement loss is related to the size of the friction force;when X dimension single step 1000 nm,the Y dimension coupling is 20 nm,when Y dimension single step 1000 nm,the X dimension coupling is 50 nm;multiple step of X,Y dimension have good repeatability,can achieve millimeter positioning range.