Development Of Ultraviolet Radiation Pyrometer

High temperature measurement plays an important role in modern industrial applications.Radiation thermometry has opened a new way for high temperature measurement.However,some factors still restrict the accuracy of pyrometer,such as emissivity,sensitivity of detector,and limitation of filter.Inspired by the pyrometer of the French company Lasur and the ultraviolet pyrometer used in wafer temperature measurement,a UV radiation pyrometer has been developed with the benefit of modern photon detection technology.Multi-wavelength spectrophotometry,colorimetric method and single wavelength method are analyzed in this dissertation.When measuring UV radiation of high temperature objects,it is considered that the error caused by emissivity variation can be decreased.In addition,the sensitivity and accuracy can be improved simultaneously.A mathematical model based on brightness temperature is selected.The ultraviolet pyrometer is calibrated by blackbody,and the parameters are fitted by least square method.In the measurement software,the brightness temperature is calculated by dichotomy.Calibration software and measurement software are developed by Visual C++ and Qt.A filter with a passband of 10 nm width with a central wavelength of 370 nm is used in the dissertation.The detector of the UV pyrometer is Hamamatsu Corp’s H11890 photon counter module,which has a detection performance in photon level.Besides,data is transmitted to the host computer via USB to realize full digital signal processing.The experimental results show that the ultraviolet radiation pyrometer developed in this dissertation can measure the faint radiation signal accurately,and can calculate the temperature of the target by the photon counting values.The pyrometer is small in size,friendly in interface and high in sensitivity.