Simulation And Analysis Of A High Stability Flexure Bending Mechanism For Submicron Focusing

Due to the characteristics of high-energy,high penetration,high detection sensitivity and high spatial resolution,the synchrotron radiation micro-probe and nano-probe has been widely used in many disciplines.In order to pursue better spatial resolution and higher throughput,scientists have developed a series of focusing methods and techniques for several decades.In many focusing methods and techniques,the aspheric elastic bending system has been widely used because of its high focusing efficiency,high spatial resolution,low processing difficulty,adjustable optical parameters and achromatic.At present,the international community has developed a series of flexible bending method and technology.In China,researching of the elastic bending mechanism and related technology is also in development.At hard X-ray micro-focusing beamline(BL15U1)at SSRF,we proposed the exact bending theory.And according to the actual situation,we proposed a method as adjusting the width of the mirror to compensate for gravity.Also the flexible hinge bending mechanism system based on weak-link is developed at BL15U1 in cooperation with APS,expecting to achieve sub-micro focusing spot at10 keV.In this thesis,the finite element analysis of the flexible hinge bending mechanism is carried out,the stress distribution of the bending mechanism is analyzed,and the width of the bending mirror is further optimized.The results of finite element analysis of the optimized bending system show that the bending mechanism can work in the elastic range of the material,and the X-ray can be theoretically focused to 164 nm.The testing results by Long Trace Profiler(LTP)show that the achieved slope error is 430 nrad,can produce a theoretical focusing spot at 230 nm.And this bending mechanism has a high stability and high repeat accuracy.The result of the finite element analysis is consistent with actual LTP measurement.The X-ray on-line test results show that without optimization,this bending mechanism can achieve 350 nm focusing spot at 10 keV.It is of great significance to realize more high spatial resolution with dynamic bending mirror.