The Mechanical Design Of 6-DOF Nanometer Micro Table

6-DOF micro table is an important part of nanometer three coordinate measuring machine (COMERO). It is used to realize precision orientation and hardware correction of spacial compositive error of workpiece. And it is required to accomplish motion of 6-DOF with nanometer positioning accuracy. This paper firstly introduces the design philosophy of micro table overall structure in detail. Deduces micro table control model of every degree of freedom. Then determine structural parameter and position of flexure hinge, which is critical element in micro table, based on mechanical theory and precision theory analysis and by using finite element check of ANSYS. At last analyzes positioning accuracy of micro table. Results indicate micro table can realize nanometer positioning accuracy in theory.