Research On The Geometrical Parameters Measurement Of Quartz Pendulous Reed With Chromatic Confocal Sensor

Quartz pendulous reed is the core component of the quartz accelerometer,which has been widely used in aerospace,military and civilian fields.It's particularly important to detect the geometrical parameters of quartz pendulous reed due to its directly affects on the performance of quartz accelerometer.Currently,there are variety of measurement methods are available to get the geometric parameters of quartz pendulous reed,and their measurement principles are not the same,but the high efficiency and high precision measurement method has been a research focus.The contents and work is as follows:Firstly,the measurement principles of various methods to obtain the geometrical parameters of quartz pendulous reed are analysed.According to the subject needs,a high-precision measurement system based on chromatic confocal sensor data acquisition and PMAC motion control is designed.This paper introduces the basic principle of the system,the structure and function of different parts in the systems.Methods of measurement step height,step thickness,droop and vibrating beam thickness of quartz pendulous reed are proposed by using this system.Secondly,different geometrical models are built based on the different measurement methods.This paper introduces the use of the least squares method to achieve a variety of geometrical model data fitting.What's more,this paper presents an efficient metering system software,to achieve the step height,step thickness,droop and vibrating beam thickness of quartz pendulous reed.Finally,the influence of different factors on the measurement results of the measurement system and the uncertainty of different measurement methods are analysed.Experimental results show that the step height and step thickness repeatability measurement accuracy can be achieved within 1?m,the droop of quartz pendulous reed repeatability measurement accuracy can be achieved within 3?m,realized the purpose of high-precision measurement of the geometrical parameters of quartz pendulous reed.