The Study On Shape Parameters Measuring Technology Of Quartz Pendulous Reed

The quartz pendulum reed is the core of the quartz flexible accelerometer,it can get the speed of a measured object,acceleration and tilt and so on physical information by sensitivity of the quartz pendulum reed,therefore,quartz pendulum reeds affects the performance of quartz accelerometer.Due to the flexible quartz accelerometer with high accuracy,strong seismic capability,low power consumption,good stability,and has been widely used in underwater vehicle(AUV),unmanned aerial vehicles(UAV),ships,army ground vehicles,tactical missiles,submarines,and other navigation systems in the MEMS family of inertial accelerometers.In addition,the civilian aspects such as oil well drilling,construction of large bridges flexible terms quartz accelerometer are also been used.Quality of quartz pendulum reeds has a decisive influence to quartz flexible accelerometer,therefore,the measurement to quartz pendulum reeds has far-reaching meaning.Shape parameters of quartz pendulum reeds determine the quality of the merits.By comparing the shape parameters to their ideal value to judge whether the production of quartz pendulum reeds can meets the quality requirements,and thus quartz pendulum reeds which has large defects will be excluded.On the other hand,quartz accelerometer to be produced if there is good geometric parameters of quartz pendulum reeds.Thus,their shape geometric parameters are measured accurately has very important significance.This paper seeks a high-precision measuring system to achieve the purpose-to measure quartz pendulum reeds shape geometric parameters-center and radius which will be used to evaluate their quality.Specific research and implement process are as follows:Firstly,the measuring methods and measuring content to quartz pendulum reeds are introduced,having a analysis and comparison to their advantages and disadvantages,elaborating overviews of measurement to quartz pendulum reeds and images.According to the subject needs,data's acquisition of CCD semiconductor sensor and motion control by PMAC of high-precision measuring systems has been designed.Having a simple analysis to the basic operating principle,different structure's function of system.The measuring methods of quartz pendulum reeds shape geometric parameters has been put forward.Secondly,the paper describes image measurement to quartz pendulum reeds,which relates to image processing methods include image smoothing,binarization and edgedetection algorithms,the sub-pixel positioning principle of zernike moments is focal point.Then based on the principles of image processing algorithms designed a software which has high measuring efficiency,and reached the purpose-to measure geometric parameters-centers and radius of quartz pendulum reeds.Finally,the experimental measurements has been given,and demarcate to system,experimental data has also been given,we obtain that quartz pendulum reeds have good roundness through analysis to the shape parameters derived.Processing quality can meet the requirements.Finally,the various factors affecting experimental data are analyzed,deficiencies and improvement program are bring forward.