Quartz Pendulous Reed Design And Processing Technology By Chemical Etching

Quartz flexure accelerometer, as one of the high precision mechanical linear accelerometers, wasan important sensor in the inertial navigation system. Quartz pendulous reed was the heart of thequartz flexure accelerometer, which was used to be an acceleration sensitive component. Unlike metalmaterial, quartz belonged to the hard and brittle materials, which had the defect characteristics of highstrength, non-conductive, low fracture toughness and high hardness. The quartz pendulous reedflexible beam was easily to break in operating, so it was very difficult to use the traditional methodof processing. Aiming at the material characteristics of quartz, dimensional accuracy requirements ofquartz pendulous reed flexible beam and boss, this paper presented a quartz pendulous reed chemicaletching processing technology and its ptosis quantity detection technology.The main work and innovations were as follows:In the first chapter, the development status of quartz pendulous reed processing technology andits ptosis quantity detection technology at domestic and abroad were summarized. Then the mainresearch content and significance proposed in this paper.In the second chapter, the structure and working principle of the quartz flexure accelerometerwere introduced. Then established its dynamic equations, the transfer function and staticmathematical model, which was helpful to the understanding of the performance parameters of theaccelerometer. Described the structure and the characteristics of quartz material in detail. Thedimension of quartz pendulous reed was designed and its load was calculated.In the third chapter, the finite element analysis method was introduced from two aspects of modalanalysis and harmonic response analysis. Quartz pendulous reed was established with ANSYSsoftware finite element model. According to different thickness of the flexible beam quartz pendulousreed had carried on the static analysis, obtained the different thickness of flexible beam of strain andstress under the same load. Through the analysis of the static quartz pendulous reed could improvethe sensitivity of the accelerometer. Quartz pendulous reed for the modal analysis, the first five ordermodal frequency and vibration model were obtained. To ensure that the quartz flexible accelerometermeasurement precision, quartz pendulous reed must be far away from the environment of theresonance frequency.In the fourth chapter, the paper analyzed the quartz pendulous reed processing principles ofchemical etching from four parts: solution feature of hydrofluoric acid, surface features of quartzmaterial, reaction mechanism and reaction molecular model. Analyzed the technological process ofquartz pendulous reed of chemical etching technology, including the selection of corrosive liquid, the protective layer and the selection of equipment and process control. Introduced the quartz pendulousreed of flexible beam thickness measurement method. Then chemical etching processing experimentwas carried out, and the results of the experiment verified the effectiveness of the technology.In the fifth chapter, the concept of quartz pendulous reed of ptosis quantity was introduced, andthe theoretical calculation. The principle of ptosis quantity detection was put forward. Then theoverall design of ptosis quantity detection system had carried on. According to the plan, the deviceused in the parts and components were introduced one by one. To build complete ptosis quantitydetection platform, physical objects were described. Then ptosis quantity detection experiment wascarried out, and the results of the experiment verified the effectiveness of the technology. It alsoverified the finite element static analysis and ptosis quantity calculation accuracy.Finally, the conclusions of the dissertation were summarized and research of chemical etchingprocessing of quartz pendulous reed and ptosis quantity detection were proposed.