Metal Doping To Construct Composite Diamond-like Carbon Film And Its Tribological Properties

Due to national energy gap is more and more big and the improvement of modern industrial demand for energy saving,environmental protection and efficiency,it is of great significance to develop and study the antiwear and friction-reducing carbon-based films with high hardness and strong toughness as well as low friction.In this work,the solid-lubricating diamond-like carbon?DLC?film was successfully fabricated by reactive magnetron sputtering technique.Based on the dry-sliding condition in ambient air and mixed-frictional condition in water,the effect of the CH₄ flow rate in the process of preparation on the microstructure and tribological properties of the metal containing DLC films were systematically studied.The main results are as following:1.With the increase of the CH₄ fow rate,the thickness of the film and the content sp3 in the film increase.In air atmosphere,the friction coefficient and wear rate of Ti/a-C:H film firstly decrease and then increase with the increase of CH₄ flow rate.The film deposited at the the CH₄ flow rate of 12 sccm has the lowest friction coefficient and wear rate in air atmosphere and possesses excellent antifriction and anti-wear performance in water environment condition.2.It has appropriate Cr element content in Cr/a-C:H film deposited at the the CH₄ flow rate of 20 sccm with dc reactive magnetron sputtering technology.The film deposited at 20 sccm possesses high hardness,high adhesive force and the lowest friction coefficient and wear rate in air condition.The Cr/a-C:H films have lower friction coefficient and wear rate in deionized water condition compared to that in air condition.It possesses more excellent tribological performance in water condition.3.The Fe/a-C:H film is a composite diamond-like carbon film structure.The Fe/a-C:H film deposited at the the CH₄ flow rate of 18 sccm has the lowest friction coefficient and the best wear resistance in the air condition and deionized water condition.Compared to that in air condition,the friction coefficient and wear rate of Fe/a-C:H films are lower in deionized water condition.