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Gas-sensitive Properties Of Carbon Nanotube-doped CuO/SnO 2 Nanofilms For H 2 S

Posted on:2018-11-19Degree:MasterType:Thesis
Country:ChinaCandidate:J N QuFull Text:PDF
GTID:2351330515478871Subject:Microelectronics and Solid State Electronics
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In recent years,we are enjoying a better life with the science and technology and bounds,rapid economic development,Air pollution become a serious problem affecting people's healthy.Hydrogen sulfide?H2S?is one of the pollution gas and has highly toxic to human body.So it has great significance to study H2S gas sensor.We prepare CuO/SnO2 sol by using sol-gel method and enhance CuO/SnO2material to H2S gas sensitive performance.At the same time,in order to solve the film by sol-gel has cracking problem,SEM characterization indicates that adding glycerol can effectively solve this.Preparation of CuO/SnO2 sol,according to CuO doping amount of mole ratio of 5%,10%,15%for three groups of experiments;Later,according to the four kinds of doping concentration 0.001g/10ml?0.002g/10ml?0.003g/10ml?0.004g/10ml of CNTs.Then let multiple sets of different doping concentration of sol spin on the interdigital electrode.By drying pretreatmen and annealing to get many groups of gas sensitive element.SEM characterization indicates when annealing temperature is 500?of grain on the surface of thin film gets the most uniform and stable and crystallinity is best.According to the experiment requirement,to build gas sensitive test environment by myself,let many groups of gas sensitive element comparison test.The characterization and gas sensitive tests show when CuO doping amount of mole ratio of 10%has best performance,the sensitivity is 32.9 in 1400ppm H2S;The gas sensitive tests show that doped 0.003g/10ml has best performance,the sensitivity is 57.5 in 1400ppm H2S,response and recovery time is 18s and 37s.The best working temperature test shows that CuO/SnO2 thin film's best working temperature lower than pure SnO2 almost75?,CuO/SnO2 thin film and CuO/SnO2 doping CNTs has the same working temperature is 275?.
Keywords/Search Tags:sol-gel, CuO/SnO2thin film, CNTs, H2S gas senor, doping concentration
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