Study On The Preparation Of Fe-N Films By High Temperature Nitriding And The Doping Characteristics

As a typical magnetic material,Fe-N compounds have extremely rich magnetic properties,such as good oxidation resistance,abrasion resistance and corrosion resistance.According to their nitrogen content,Fe-N compounds are classified as:?-Fe_xN?2?x?3???-Fe₂N???-Fe₄N????-Fe₁₆N₂.Different Fe-N compounds have different microstructures,electronic properties and magnetic properties.This article mainly uses the method of magnetic sputtering and high temperature nitriding to prepare Fe-N thin film.We mainly studied the effect of different nitridation time and different doping concentration on the microstructure,surface morphology and composition properties of Fe-N materials.For undoped Fe-N compound samples,we investigated the basic characteristics by controlling different nitridation times.It was found that the sample had diffraction peaks of three crystal planes at 1 hour of nitriding,which were the cubic phase???-?111?plane,hexagonal phase?-?111?plane and?-?002?plane.This showed that the samples obtained were polycrystalline film samples and the samples were in granular form.As the nitridation time was increased to 3 hours of nitriding,it was found that the hexagonal and cubic phases of the samples had only one diffraction peak respectively.It showed that the samples were in a single orientation,and the prepared samples were of good quality.For Ga-doped Fe-N compound samples,we studied their basic properties by controlling different doping concentrations.The doping concentration was controlled by adjusting the sputtering RF power.When the doping concentration was low,the sample had two diffraction peaks,which were the cubic???-?111?plane and the hexagonal?-?002?plane,and the sample had a larger particle size morphology.As the increasing of RF power,the sample had only one diffraction peak related to cubic phase.The surface particles of the samples were much smaller than those produced by the low doping concentration,which indicated that the samples were of good quality.By studying the effects of different nitridation times and doping concentrations on Fe-N compounds,the microstructure and surface morphology of Fe-N compounds prepared with different parameters were clarified,providing experimental basis for the further research of Fe-N compounds.