Development And Experimental Study On Sawing Wire Of Semi-fixed Abrasive Wire-Saw Slicing

Wire-saw slicing technology is popularly applied in the production of wafers in the photovoltaic and microelectronic industry.The mainstream slicing technology is currently free abrasive slurry wire-saw slicing.Owing to its main limitations of low productivity,environmental pollution and high kerf loss,a new kind of slicing method termed semi-fixed abrasive wire-saw slicing emerges,which is novel reforming for the wire appearance,or rather the special surface microgroove structures,to lead more free particles into the semi-fixed state akin to the fixed abrasive action.The main study works around the development and slicing experiment of the semi-fixed abrasive sawing wire included in this paper are as follows:(1)Through the enterprise investigations and market researches,the composite cold coiling machining is eventually selected as the forming method of the microgroove structures according to the exploratory experiments of four types of micro-fabrication technologies.(2)The processes of cold coiling and unloading resilience are analysed and the formulas and its range of application for calculating the diameter of interior and exterior ones are deduced.Then the reliability of the applied formulas are verified by a cold coiling experiment.(3)A general design of new wire-saw winding equipment is performed by analyzing the existing contradictions in traditional winding equipment based on TRIZ theory and the sample is manufactured on the basis of mechanism design and analysis.(4)After the consideration of sawing wire's performance requirements and material selection,the semi-fixed abrasive sawing wire fabrication under the established groove shape is accomplished in use of our own cold coiling experiment and the surface quality and geometric dimensioning are also observed subsequently.(5)The contrast slicing experiments on the three types of sawing wire are conducted.The experimental results show the semi-fixed abrasive ones' optimal performance and the validity of slicing mechanism,feasibility of cold coiling and effectiveness of semi-fixed abrasive wire-saw method are also testified by the observation of sliced wires and slices' surface appearance.