Investigation On Preparation And Properties Of An All Solid State And Inorganic Electrochromic Device

Electrochromism which involves reversible and stable color change is an interesting property of all kinds of so-called electrochromic materials.When certain value of voltage is applied to those materials,their optical properties are transformed,hence the color of the materials would be changed.Films which constitute the all-solid state and inorganic electrochromic device were deposited by magnetron sputtering with inorganic target based on mechanism of electrochromism.Optical and structural properties of these films were thoroughly investigated.Based on these investigations,all films were sputtered on FTO in a certain order.All the research carried out is outlined as follows:WO3 film samples were prepared using ultrapure W target by DC reactive magnetron sputtering.WO3 films with different thickness and structures were fabricated.Electrochromic property of these films was investigated by using LiClO4/PC.TaOx films were prepared using ultrapure Ta target by DC reactive magnetron sputtering.The effects of time and temperature on the structure of these films were investigated.Ionic conductivity and electronic insulation properties of these films were tested in LiClO4/PC.Li+ source films were prepared using ultrapure lithium containing inorganic target by RF reactive magnetron sputtering.Different kinds of targets were used in order to prepare different Li+ source films with different structure.Electrical and structural properties of these films were investigated.NiOx film samples were prepared using ultrapure Ni target by DC reactive magnetron sputtering at room temperature.Effects of argon-oxygen ratio and time on ultraviolet and visible light transmittance were inverstigated.An all-solid state and inorganic electrochromic device with the structure of FTO/WO3/TaOx/LiTixOy/ITO was fabricated eventually.The results indicated that the device has good electrochromic property.