Preparation Of TiO₂ Or ZrO₂ Superhydrophobic Film And Performance Study By Fine Patterning

The contact angle of the super hydrophobic materials is greater than 150° with water and its sliding angle is less than 10°.Super hydrophobic materials have a broad application prospects including the self-clean,waterproofing,anti-icing,anti-adhesion and other fields.due to its non-wetting.There are two ways to build the super hydrophobic surface.One is to build micro-rough structure on the surface of materials with low surface energy.The other is to modify the materials with low surface energy in the rough surface with high surface energy.However,it's the key to building micro-rough structure on the surface of materials to fabricate super hydrophobic materials that.The aim of the article is to prepare the TiO₂/ZrO₂ thin film by using the photographic sol-gel micro-fabrication techniques and build micro-rough structure which is neat micro-nano level lattice graphic,then modify it chemically with the low surface energy materials in order to make it be provided with the super hydrophobic properties.Finally,a new method is to explore to prepare the super hydrophobic materials.In this work,the TiO₂/ZrO₂ photo-sensitive sol was prepared by employing the method of photographic sol-gel,and then cast the TiO₂/ZrO₂ photo-sensitive gel film by the dipping pulling method.After dealing it with the double beam laser interferometry exposure,washing,and heat treatment,the TiO₂/ZrO₂ thin film was obtained whose surface has micro-nano level grating and lattice graphic.The fine patterning TiO₂/ZrO₂ thin film's surface was chemically modification with 1H,1H,2H,2H-perfluorooctyl trichlorosilane.The properties of the modified TiO₂/ZrO₂ thin film were characterizationed using infrared spectroscopy,ultraviolet spectrum,X-ray diffraction,X-ray photoelectron spectroscopy,Atomic Force Microscope,Scanning electron microscope,Confocal laser scanning microscope and hydrophobicity.The specific research contents and results are as follows:?1?Sol photosensitive research results showed that:the ultraviolet absorption peak came up with 48nm red shift.With the increase of the illumination time and the heat treatment temperature,the intensity of each infrared absorption peak showed a downward trend.The sol was provided with a good photosensitivity and meets the requirements of micro-machining.?2?Prepared the ordinary TiO₂ film,fine patterning TiO₂ film without the surface modification.TiO₂ film of surface modification without graphics and the TiO₂ film of surface modification with graphics.It was investigated that the effect of the heat treatment temperature on the crystal structure of the ordinary TiO₂ films and hydrophobicity.The TiO₂ film was on organic and inorganic film at the temperature of 300 ?.Most of the anatase structure was transformed into the rutile structure at the temperature of 700?.The TiO₂ film was entirely transformed into the rutile structure at the temperature of 900 ?.However it was also entirely transformed into the anatase structure at the temperature of 500 ?,so that the TiO₂ film has the best hydrophobicity.The TiO₂ film thickness of surface modification with graphics was 50?100nm,The chemical absorption was existed between the surface modifier and the film.The binding energy of fluorine atoms of a 1s orbit was 688.7ev,the effect of fine patterning and surface modification on the hydrophobicity of TiO₂ film was studied.It was revealed that when the TiO₂ film was fabricated in the case of same film thickness and heat treatment temperature,the fine patterning TiO₂ film was endowed with the better hydrophobicity than the ordinary.The TiO₂ film with surface modification has the better hydrophobicity than ones without surface modification.The modified TiO₂ film of with graphics possed the best hydrophobicity.?3?We also discuss the effect of the thickness of the film,the fine pattern?grating and lattice?and the lattice periodic size on the hydrophobicity of TiO₂ film of surface modification with fine patterning.The results indicated that:with the increase of the films' thickness,the contact angle had an increasing trend.The TiO₂ film with a lattice graphics possed the better hydrophobicity than TiO₂ film with grating graphics.In the case of the lattice size of the fine pattern within 0.83?3.33?m,with the decrease of the lattice size,the hydrophobicity of TiO₂ film possed an increasing trend.When the film's thickness and lattice size were 70nm,0.83?m,respectively,the hydrophobicity of TiO₂ film reached the maximum of 163°.?4?The TiO₂ film was modified with fine patterning in the Hartz copper and study their corrosion resistance.The results showed that:After Cu/TiO₂ substrate was corroded in pH=2 acid for 20 hours,in pH=12 alkali for 25 hours,and in saturated sodium chloride for 15 hours,the contact angle was kept stable at 154°,156°,158°,respectively.Its corrosion potential was 0.12V,and reveals a very strong corrosion resistance in the 0.5%sodium chloride solution.?5?The Super hydrophobic ZrO₂ film was fabricated by the photographic sol-gel micro-fabrication technique.It was found that the same change laws as super hydrophobic TiO₂ film.The 0.82mol/l sol concentration,0.8%addition PEG was selected to get the Super hydrophobic ZrO₂ film with lattice periodic size of 1.11 ?m,fully tetragonal phase structure.The contact angle was up to 155°.