Research On Vacuum Equipment Control System For Glass Modification Process

The vacuum magnetron sputtering coating production line is a key equipment for preparing low-emissivity glass,ITO conductive glass and CIGS thin-film solar cell glass,and has a huge market demand.China's glass coating automation production line started late,and has long been relying mainly on imports.The distributed control system is directly related to the safe and efficient production of enterprises.Therefore,accelerating the independent research and development of vacuum magnetron sputtering glass coating production line is of great significance to enterprises.According to the actual production demand of a domestic company,combined with the principle of vacuum magnetron sputtering,the control system of coated glass vacuum equipment production line is studied.Firstly,targeting at the complex production process of glass coating production line,SoildWorks software was used to design a single vacuum cavity structure.and the modal analysis of the single vacuum chamber was performed using ANSYS Workbench 18.0 software.Secondly,it studies various subsystems such as vacuum environment control system,operation strategy of vacuum pump group,transmission control system and vacuum chamber temperature control system in process control were studied.Thirdly,the temperature control system in the preparation process of CIGS thin film solar cell glass is studied.In order to improve the response speed and stability of the control system,a mathematical model of the temperature control system is created.The fuzzy adaptive PID control algorithm and the traditional method are simulated and simulated using MATLAB software.The advantages and disadvantages of PID control algorithms are applied to practical engineering.Finally,the overall design of the production line control system is studied.Two Siemens s7-400 series PLCS are adopted as the control core of the lower computer,and WinCC7.0 configuration is used as the monitoring platform of the upper computer.The overall control system of the production line is constructed by combining the fieldbus technology,industrial Ethernet communication and distributed I/O modules.The practical application shows that the background vacuum degree of the coating chamber can be controlled within 5×10^-6 mbar,and the speed control is relatively stable under the automatic operation,and the glass is not found to have excessive deviation in the cavity.The temperature control system using fuzzy adaptive PID control algorithm can better adapt to the changes of the controlled object in the control process,and has the advantages of small overshoot and good stability.Combined with modern automation technology to build s7-400 series PLC and WinCC configuration as the core of the control system has good reliability.At present,the project is running well and reliable in the commissioning phase,which not only improves product quality,but also reduces production costs and achieves the expected results.Fig[50]table[10]reference[66]...