Influence Of Magnetic Field On Arc Spot Motion For Arc Ion Plating Application

Arc ion plating is a new kind of ion plating technology,It is widely used in hard films and decorative films,with high ionization rate,high deposition rate and low deposition temperature.However,the Macro-particles pollution seriously restricts the development of the arc ion plating technology.The purpose of this thesis is to analyze the arc spot movement and the quality of the coating film under the axial symmetrical magnetic field and scanning magnetic field,and establish the control mechanism of the arc spot motion in magnetic fieldIn this paper,from arc discharge mechanism and arc spot movement mechanism,the control mechanism of arc spot motion in horizontal magnetic field and vertical component in axisymmetric magnetic field is put forward by means of experiment.With the increase of the magnetic field strength of the horizontal component of axial symmetry magnetic field,the arc spots on the surface of the target change from random motion into circular motion gradually,and the tangential velocity of the circular motion increases as the horizontal magnetic field becomes stronger.With the increase of the vertical component of the axial magnetic field,the angular velocity of the circle increases accordingly.The vertical component and the horizontal component of the axial symmetrical magnetic field jointly control the radius of the trajectory of the arc spot.The speed and trajectory radius of the arc spots affect the temperature distribution of the target surface,and then affect the quality of the coating surface,the composition of the film and the deposition velocity of the film.The faster of the arc spot velocity,the larger of the radius of the moving trajectory,can make a lower average temperature and less high temperature points target surface,and get better quality of the coating surface,but relatively the deposition rate will be slow.If the coating layer is TiN film and the average temperature becomes higher and high temperature points of the target surface becomes more,after deposition,the main component will be changed from(111)TiN to(200)Ti2N.N element content decreases gradually and the color will gradually become deep,from light golden to bronze.According to the control mechanism of arc spot motion,a method of controlling the arc spot motion by scanning magnetic field is developed.By setting the scanning range,scanning waveform and scanning frequency of the scanning magnetic field,the arc spot moving trajectory radius can be periodically enlarged or reduced on the target surface.This method can greatly improve the utilization ratio of target,and can obtain better surface quality and higher deposition velocity.