Deformation Behavior Of Metal Foils In Micro Pneumatic Deep Drawing Process

In recent years,with the rapid development of micro electro mechanical system(MEMS),Miniaturization is the main trend in the development of component in electronic,medical,communication and other fields,which greatly promoted the development of micro forming process.The current main processing technology is micro deep drawing process(MDD)without pressure medium in the field of micro deep drawing,there are generally problem of wrinkle at the rim of micro cup,worse surface quality,low product rates and springback etc.of the micro cup.Compared with the conventional micro deep drawing process,formability of material was improved by micro hydromechanical deep drawing(MHDD)using hydraulic oil and water as pressure medium.In the micro deep drawing die cavity,the counterforce of the pressure medium opposite to the forming direction on the metal foil,can effectively improve the surface quality of finished products and product rates,the problem of conventional micro deep drawing process without pressure medium.In order to improve the formability of metal foil,often need to heat foil to a certain temperature a period of time before forming,due to ignition or vaporization temperature limit of commonly used liquid medium,MHDD is not suitable for metal foil forming at high temperature.Therefore,the study proposes a micro pneumatic deep drawing(MPDD)process with gas medium,that can effectively solve the problem of traditional micro deep drawing process and provide the conditions for the realization of high temperature micro deep drawing in the future.Some main work of this paper is as follows:(1)This study developed a single stroke and servo drive micro pneumatic deep drawing device,in order to carry out smoothly experiment of micro pneumatic deep drawing.(2)For the purpose of deformation behavior of metal foil in micro pneumatic deep drawing process,the experiment of thickness of 50?m pure titanium foil and copper foil at different process parameters including forming pressure,punch radius size,forming speed,forming stroke were carrid out.(3)In order to obtain the deformation behavior,stress and strain distribution and the influence of friction coefficient on the deformation behavior of the metal foil in the micro drawing process.Finite element analysis of micro pneumatic deep drawing process was carried out by ANSYS/LS-DYNA software.The influence of friction coefficient on the deformation behavior of metal foil in micro pneumatic deep drawing process were obtained.