Preparation,Microstructure And Properties Of AlFeCuNiCrTi And FeCoNiCrAlCuSi High-Entropy Alloy Films

The high-entropy alloy has a unique effect of simplifying and simplifying with its novel alloying strategy and its four major effects.Regardless of how complex and cumbersome the component components are,its organization still has only a single-phase or two-phase structure.This has set off a wave of research on this new material design in the academic field around the world,and people want to explore the secret of this "dark horse" in the alloy system performance competition to stand out and take the lead.More and more new alloying element compositions have proven to have excellent performance in a certain field.This also brings new ideas for future research on high-entropy alloys.In this paper,AlFeCuNiCrTi and FeCoNiCrAlCuSi circular targets were prepared by vacuum arc melting and SPS spark sintering.The high-entropy alloy films were prepared by DC magnetron sputtering using stainless steel sheets and glass substrates as substrates.XRD,FESEM,VSM,polarization curves,nanoindentation and other analytical methods were used to investigate the changes of microstructure and properties of the films under different sputtering time and power conditions.The research results draw the following conclusions:(1)The microstructure and morphology of AlFeCuNiCrTi high-entropy alloy film: affected by sputtering time and power;the crystal structure of the film changes from amorphous structure to FCC solid solution structure,and the crystal structure of the film is different from that of the target.The surface morphology of the film tends to be flat and dense with increasing sputtering time and power,and the film thickness is continuously increased up to 2.98?m.(2)The poperties of AlFeCuNiCrTi high-entropy alloy film: The microhardness and Young's modulus of the film increased with increasing of the sputtering time and the power,and reached the maximum at 150W-120 min,which were 11.659 GPa and 154.354 GPa respectively;The corrosion resistance of the film in 3.5% NaCl,5% NaOH and 10% H2SO4 solution is better than that of 201 stainless steel.(3)The microstructure and the morphology of FeCoNiCrAlCuSi high-entropy alloy film: the crystal structure of the film changes from amorphous structure to FCC solid solution with increasing of the sputtering time and power;The surface morphology of the film is most uniform and compact under the condition of 100W-60 min.The film thickness is continuously increased up to 5.52?m.(4)The properties of FeCoNiCrAlCuSi high-entropy alloy film: The microhardness and Young's modulus of the film increase with the increasing of sputtering time,and the mechanical properties of the film are greatly affected by the film thickness under longer sputtering time.As the sputtering power increases,its mechanical properties are greatly affected by the grain size and surface morphology under larger sputtering power.The microhardness and Young's modulus maximum are 6.211 GPa and 116.933 GPa respectively;the film prepared under the condition of too long sputtering time or high sputtering power is not as good as 304 stainless steel.Under low sputtering time and power conditions,its corrosion resistance is better than 304 stainless steel;The magnetic properties of the film at room temperature are good.The-saturation magnetization is high,its maximum value is 16.78emu/g.and the coercive force and remanent magnetization are low.The thin films are good soft magnetic materials.