Microstructure And Properties Of High Entropy Alloy Films Prepared By Direct Current Magnetron Sputtering

High entropy alloy is a new type of multi-principle component alloys, high entropy alloy prepared by greater or equal to five kinds of metal and non-metal element in accordance with an equimolar or near equimolar ratio. entropy alloy has simple crystal structure, excellent mechanical properties, high stability and excellent corrosion-resistant properties due to the presence of high entropy of mixing. Therefore high entropy alloy is regarded as one of the most new valuable structural materials in the future. Good mechanical and corrosion resistance of high entropy alloy provide a starting point for the preparation and study of high-entropy alloy film.Therefore, we successfully prepared Fe Al Co Cu Cr Mn and Fe Al Co Cu Ni V high entropy alloy films by magnetron sputtering technique in this article, and expect that the above-mentioned properties can be reflected in the films. XRD, FESEM, Polarization curve, Nanoindentation, and other analytical methods were used to analyze the structure and properties of high entropy alloy thin films, explored the impact of the sputtering time and sputtering power on the structure and properties of high entropy alloy thin films, and obtained the following results:(1) Fe Al Co Cu Cr Mn high entropy alloy films structure: With increasing of sputtering time and power, the structure of alloy thin films changed from amorphous structure to a single FCC solid solution structure. The structure of alloy thin films changed from amorphous structure to crystals structure with increasing of sputtering time and finally formed a dense, smooth alloy film surface; The increases of sputtering power can promote grain growth from several tens of nanometers to about 200 nm rapidly.The thickness of alloy films linearly increased with the increase of two variables, reaching a maximum2.694?m at 150W-60 min.(2) Fe Al Co Cu Cr Mn high entropy alloy films properties analysis: Nanoindentation experiment results show that the hardness and the Young's modulus of the alloy thin films increased with the increasing of sputtering time and power, obtained maximum 19.6225 GPa,227.2682 GPa respectively, at 150W-60 min. Accordingly, the mechanical properties of high entropy alloy films is superior to the traditional alloy films. There are almost no segregation and fine grain effect, so that Fe Al Co Cu Cr Mn high entropy alloy films have better corrosion resistance than 201 stainless steel in 3.5% Na Cl, 5% Na OH, 10% H2SO4 solution.(3) Fe Al Co Cu Ni V high entropy alloy films structure:The increase of sputtering time and power is helpful to enhance the crystallization ability, and finally form a simple FCC or FCC &BCC solid solution structure. The grain size becomes larger and the film density decreases with the increasing of the sputtering time. With the increase of sputtering power,the size increases, but the density of the films improved.The thickness of the films linearly increased with the increase of the power and the time,and reaches a maximum 2.688?m at150W-60 min.(4) Fe Al Co Cu Ni V high entropy alloy films properties analysis: Alloy films' hardness and Young's modulus first increased and then decreased with increasing of the sputtering time, and achieved maximum 189.389 GPa 19.73817 GPa at 150W-20 min. The results of polarization curves show that the corrosion resistance of Fe Al Co Cu Cr Mn high entropy alloy film is superior to 201 stainless steel in 3.5% Na Cl, 5% Na OH and 10% H2SO4 solution.