| Micro array holes are becoming more common in MEMS applications due to their unique micro-spray functional structure.However,in the micro-EDM micro-array holes process,there is a phenomenon that the inner and outer holes of the micro-array hole are inconsistent.It affects the performance of micro-jet parts to micro array holes are inconsistent.Therefore,the difference in the aperture between the inner and outer holes of the micro array holes of the array electrode EDM has become an important technical problem faced by the development of micro-EDM technology.In this paper,the distribution of the flow field,pressure field and electro-erosion products in the discharge gap of array electrode EDM combined micro-array is numerically simulated from the flow field simulation and experimental point of view.Reveal the mechanism of the action of ultrasonic vibration on the process of electrolytic corrosion elimination and the regularity of the difference in the aperture processing of the inner and outer holes of the array holes,and experiment verification.This paper provides theoretical basis and technical support for the study of micro array holes EDM consistency processing.Firstly,the three-dimensional gap flow field simulation model is established for the array electrode EDM ultrasonic processing micro array holes processing process.Three-dimensional gap flow field distribution,pressure field distribution and erosion product discharge process by numerical simulation of micro array holes(3×3)EDM The influence of ultrasonic high-frequency vibration on the discharge process of electro-erosion products in micro-EDM ultrasonic processing is analyzed,and effect of hole depth-to-diameter ratio,ultrasonic amplitude,array hole spacing and ultrasonic frequency on the efficiency of micro array holes EDM.The discharge mechanism of electro-erosion products in micro array holes EDM is revealed under the action of ultrasonic vibration.Secondly,the three-dimensional gap flow field simulation model of serialized(3×3,5×5,10×10)micro array hole EDM combined machining process is established.The gap flow field distribution,pressure field distribution and erosion product discharge process are numerically simulated to a series of tiny array holes EDM combined machining.The influencing factors causing the inconsistency of the inner and outer pore diameters of the array holes are analyzed from the flow field angle.The distribution of the gap flow field,pressure field and electrolytic corrosion products in the discharge gap is revealed in the process of array electrode EDM micro array holes.Finally,array electrode is fabricated by electric spark anti-copy method.Array electrode EDM ultrasonic processing of micro array holes(3×3)processing experiments were carried out.The effect of ultrasonic high frequency vibration on the processing efficiency of array electrode micro-EDM array holes is analyzed.The variation of the pore size of the inner and outer pores of the array hole was obtained through the series of micro array holes.Simulation rationality is verified by experiment. |
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