Experimental Study On Polishing Internal Surface Of Quartz Glass Tube By Ultrasonic Magnetic Abrasive Finishing

In recent years,with the rapid development of electric light source,semiconductor,optical communication,military industry,metallurgy,building materials,chemistry,machinery,electricity,environmental protection and other fields,quartz glass tube has been widely used in these fields,so the finishing technology of glass tube has been put forward higher requirements,especially in the field of semiconductor,optical communication and aviation,for the quality requirements of the surface of quartz glass tube.Higher.Generally,the surface of quartz glass tube is polished by mechanochemical polishing,which results in low polishing efficiency,and cerium oxide particles used in polishing will pollute the environment.As a new kind of grinding technology,magnetic particle grinding technology has the advantages of self-adapting,self-sharpening,small temperature rise and no tool compensation compared with traditional grinding methods.At present,it has been better applied to the processing of complex surface,plane,inner and outer circular surface.However,when the traditional magnetic particle grinding technology is used to grind the inner surface of glass tube,the magnetic induction intensity is low and the grinding pressure is reduced,resulting in poor grinding quality and efficiency.Adding radial magnetizing auxiliary pole in glass tube can increase magnetic induction intensity and grinding pressure of "magnetic particle brush" on inner wall of glass tube,so as to improve grinding efficiency.But after adding auxiliary magnetic pole,under the pressure of auxiliary magnetic pole,the roll and renewal of "magnetic particle brush" decrease,and regular scratches are easy to appear on the micro-surface after grinding.In view of the above problems,this paper takes JGS2 quartz glass tube(?15×200 mm)as the research object,and carries out a number of tests.Firstly,the ultrasonic magnetic particle grinding technology is proposed to grind the surface of quartz glass tube,that is,adding axial vibration to the auxiliary magnetic pole inside the glass tube to promote the rolling of the grinding particles.According to the different size of grinding particles,experiments were carried out on the ultrasonic magnetic particle grinding device.The changes of surface roughness and surface morphology after grinding the inner surface of quartz glass tube were analyzed and compared,and the best grinding particles for grinding the inner surface of quartz glass tube were obtained.Then,aiming at the current chemical mechanical polishing method,a two-stage experimental polishing method for quartz glass tubes is proposed.In the first stage,the lapping time is 40 min,and the lapping efficiency is improved byusing ultrasonic magnetic particle composite lapping.The optimal process combination is obtained by response surface method for the interaction of spindle speed,vibration frequency and abrasive particle size.In the second stage,the lapping time is 5 min,and the polishing quality is improved by using ultrasonic vibration composite polishing.The changes of surface roughness and micro-morphology of polished glass tubes were analyzed by experiments.Finally,the effects of three ways of traditional magnetic particle grinding,adding auxiliary magnetic pole and adding auxiliary magnetic pole chain on the surface roughness and micro-morphology of quartz glass tube are compared.Ansoft Maxwell software was used to compare and analyze the magnetic induction intensity of the three methods,and Workbench software was used to compare and analyze the normal pressure of the three methods on the inner wall.The simulation results were verified by experiments,and the changes of surface roughness and micro-morphology were analyzed.