Preparation And Properties Of DLC Films Deposited On Glass Substrates By Magnetron Sputtering Method

Every year a large number of building curtain wall glass,display panel glass and automotive glass surface scrapes,wear and scrapped.The DLC film material with high hardness,low coefficient of friction and other excellent performance,can effectively improve the glass in the processing,use,logistics and other scratches in the process to improve the yield.At present,the major obstacle to the application of DLC film on the glass surface is that there is a large internal stress between the glass and the DLC film,causing the film to be easily cracked and peeled off.Therefore,in this paper,a SiC buffer layer is pre-coated between the glass substrate and the DLC film to improve the adhesion between the film and the substrate,so that the DLC film can be applied on the glass to improve the hardness of the glass surface.In this paper,DC/RF magnetron sputtering method was used to deposit DLC film on the surface of ordinary carrier to study the influence of SiC buffer layer on the performance of DLC film.The effects of deposition parameters(sputtering power,argon to acetylene flow ratio,Pressure,deposition time)on the glass-based DLC film structure,hardness and visible light transmittance performance.The structure and properties of DLC films were characterized and analyzed by XRD,step profiler,SEM,Raman and UV-visible spectrophotometer.The following conclusions were drawn:(1)Pre-plating SiC buffer layer on glass substrate can effectively improve the hardness of glass-based DLC film.When the thickness of SiC buffer layer is too small or too large,the hardness of DLC film is greatly affected.When the thickness of SiC buffer layer is 46 nm,the hardness of glass-based DLC film reaches the best.(2)The hardness of DLC film mainly depends on the density of the film structure and the content of sp~3 bonds in the film.The higher the content of sp~3 bonds,the higher the structural density of the film and the better the hardness performance.(3)The visible light band transmittance of DLC film is mainly determined by the thickness of the film and sp~3 bond content.The thickness of the film has greater influence on the visible light band transmittance than the sp~3 bond content;the larger the film thickness,the visible light band transmittance of the film.The lower the content of sp~3 bonds in the film,the higher the visible light band transmittance of the film.(4)The DLC films prepared under different deposition parameters are amorphous films.When the thickness of the SiC buffer layer is about 46nm,the process parameters for depositing the DLC film are as follows:sputtering power200W,deposition pressure 1.6Pa,argon gas flow ratio 8:1,deposition time 30min,and the hardness of the DLC film reached maximum.The value is about 820 HV,which is an increase of 22.4%over the glass substrate and an average transmittance of 37.84%in the visible light band.