Preparation Of CdS Films And AZO Films By Magnetron Sputtering Method And Application Of Solar Cells

Facing the increasingly severe global energy crisis,solar energy has received more and more attention as a clean and renewable energy source.The spectral matching of CdS thin film and sunlight is good,AZO thin film has high transmittance and low resistivity in the visible light range,and it has a wide range of applications in solar cells.In this paper,Cadmium sulfide?CdS?films and Al-doped zinc oxide?AZO?films have been prepared by magnetron sputtering method respectively on glass substrate,and then they would be tested by X-ray diffraction?XRD?,scanning electron microscope?SEM?and ultraviolet-visible spectrophotometer?UV?.We analysis the influence on the properties produced by three parameters including substrate temperature,sputtering pressure and sputtering power to obtained the best manufacturing technology.On the basic of single-layer film research,AZO/CdS/p-Si solar cells were prepared.During the test,we can find that all CdS film have a 102 peak preferred orientation of hexagonal structure.At the 550nm-800nm band,the average optical transmittance of the CdS films is greater than 70%.If the sputtering pressure is too high,the film properties would reduce and the holes will appear on the surface.Beside,the increase of gas pressure within a certain range could increase the dark conductivity of the CdS films and the absorbing edge of the film moves in the direction of short-wave as the pressure increases.The change of temperature has a greater influence on the 102 peak preferred orientation of hexagonal structure of the CdS films.With the increase of the substrate temperature,the structure of the CdS films stabilized,the dark conductivity increased,and the optical transmittance was higher,and all remained above80%.Under the different ratio of sputtering power of ZnO and Al,AZO films prepared by the total sputtering method have a preferred orientation in?005?direction and high transmittance.When the ratio of sputtering power comes to 120:8,the film's resistivity decreased to 2.1×10^-3?·cm.when the sputtering pressure from 0.7Pa to 1.7Pa,increasing pressure can increase crystal quality of the films.If the sputtering pressure is too high or too low,the film conductive properties would be reduced.The films can be obtain the best conductive properties under the 0.7Pa.On the basic of single-layer film research,AZO/CdS/P-si solar cells were prepared by magnetron sputtering method.The open circuit voltage is 0.304 V,the short circuit current is14.269 mA,and the efficiency is about 1.06%of the battery.The J-V curve of the battery is similar to the J-V curve of the standard solar cell.