Research On Multi-Energy Field Compound Chemical Modification Strategy Of Single Crystal Silicon

Monocrystalline silicon has many properties such as high hardness,high brittleness,high refractive index,low mass density and low thermal expansion coefficient.It was widely used in solid-state electronics,MEMS,integrated circuits or photovoltaic wafers.Due to its unique characteristics of hard and brittle materials,it was prone to surface damage during mechanical processing,including microcracks,chipping,cornering,etc.,which affect the service life and processing efficiency of materials.In this paper,the ultraviolet catalysis and the high-efficiency energy input of infrared laser were introduced into the surface modification of materials.Under the multi-energy field chemical modification strategy,the micro-grinding of low-damage of hard and brittle materials was realized.Focus on the influence of multi-energy field chemical modification strategy on the modification efficiency of single crystal silicon materials,optimize the multi-energy field composite modification conditions and chemical modification liquid composition;compare multi-energy field composite chemical modification strategy and single chemical modification The effect of modification was proposed;the path modification strategy of multi-energy field recombination was proposed and the feasibility of its strategy was verified by experiments.The specific research contents of this paper include:(1)Research on multi-energy field composite chemical modification strategy of single crystal silicon.Taking(100)crystal face double-sided polished single crystal silicon as the research object,the modification strategy of introducing multi-energy field combination of ultraviolet light and infrared laser to promote the change of surface of single crystal silicon material was analyzed,and the path m odification experiment of single crystal silicon was designed.The composition of the surface modification layer of the material was analyzed and the feasibility of the multi-energy field composite modification strategy was evaluated according to the mecha nical properties of the modified layer.(2)Research on the principle of multi-energy field composite chemical modification strategy.The reaction kinetics experiments based on the change of energy field conditions and the adjustment of the chemical compos ition of the chemical modification liquid were designed.The variation of silicon element flaking in the solution after the modification was compared,and the influence of various factors on the modification rate was calculated and optimized.Energy field compound chemical modification strategy.(3)The impact of the modification strategy on the mechanical properties of the material.The nanoindentation experiment was designed to analyze and compare the hardness distribution and elastic modulus distribution of the modified layer under different modification strategies to analyze the uniform distribution of the modified layer.The influence of the indentation load-depth curve on the mechanical properties of the material was compared.Designing the nano-scratch experiment,combined with the ultra-depth-depth three-dimensional microscope and atomic force microscopy,the influence of the modification strategy on the surface forming mechanism of the material by calculating the critical grinding depth of the materi al,and the best modification according to the profile analysis under the fixed load of the scratch Strategy.(4)Multi-energy field composite path modification study.Based on the multi-energy field chemical modification strategy,the path modification ex periment of single crystal silicon material was designed.The feasibility of the path-based composite modification strategy was verified by scanning electron microscopy,XPS and confocal Raman spectroscopy.Based on the nanoindentation experiment,the hard ness and elastic modulus values of the modified and unmodified regions were compared after the path-based composite modification strategy was applied to the same material,and the mechanical properties of the path were evaluated according to the nanoindent ation load-depth curve analysis.Finally,based on the comparative analysis of the doublegrinding groove collapse of the micro-grinding rod,the role of the path-based composite modification strategy in micro-machining was evaluated.The results showed that the reaction degree could be enhanced by adding a light energy field,the reaction rate could be accelerated,the modified region could be controlled,and the material properties could be improved,and the single-crystal silicon multi-energy field composite chemical modification could be realized.Under the multienergy composite chemical modification strategy studied in this paper,the composite modification strategy could make single crystal silicon produce a thicker modified layer in a shorter time,and obtain smaller hardness value and elasticity under the same maximum load.And could control the path of surface modification of single crystal silicon material by infrared laser path,and then increased the critical depth of brittleplastic removal transition by multi-energy field chemical modification strategy under the premise of ensuring the material meets the hardness requirement.It could improve the current slow modification speed,ineffective modification effect and uncontrollable modification area of single chemical modification,and provide theoretical basis for realizing low damage and even damage micro-machining of hard and brittle materials such as single crystal silicon.