| The UV illumination system is one of the important components of a lithography system or a curing system.UV illumination system can be the light source of the lithography system or curing system.At present,the ultraviolet LED lighting system has become one of the most popular lighting method in lithography systems or curing systems because of its economical and environmentally friendly features.The uniformity of the UV LED lighting system directly affects the results of photolithography and curing.This thesis studies the uniformity detection technology of UV LED lighting system and develops a real-time detection system.This article first introduced the purpose and significance of the research,expounded the application of UV illumination system and discussed the advantages and development trends of LED UV illumination system,and introduced the current research status of the illumination system uniformity detection technology.Combined with the proposed multi-point real-time detection technology as well as a modified algorithm,a UV LED illumination system illumination uniformity detection system was designed.The system consists of detector units,data processing units and human-computer interaction and display units.The detector unit selects a UV-enhanced PIN photodiode,and a composite current-voltage amplifier circuit is designed to convert and amplify the output signal of the UV-enhanced PIN photodiode.The high-speed,low-power MSP430 microcontroller is used as the core processing unit of the data processing unit to implement data processing functions.Also the human-computer interaction and the display interface has been designed,which realized the calibration function and the examination result display function.The experimental results show that the illuminance uniformity detection system of the LED ultraviolet illumination system basing on the proposed multi-point real-time detection technology is actually expected to be compounded. |
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