Research On The Fundamental Theory On Damped Flexure Hinges And Its Experiment

In order to meet the requirements for high speed and high precision in nano-manufacturing processes,the scanning frequency of micro-nano precision positioning stages,such as atomic force microscope(AFM)and scanning tunneling microscope(STM),has reached thousands of Hertz.This puts forward a higher requirement for dynamic performance of flexure-based positioning stages.As an important part of a compliant mechanism,flexure hinges greatly restricts dynamic performance of micro-nano precision stages due to their lightly damped resonance.Therefore,the research on damped flexure hinges and its application have become the focus of improving the dynamic performance of micro-nano precision positioning stages.To this point,research on the fundamental theory on damped flexure hinges and its application is carried out in the paper.The main research works are as follow.1)A theoretical model of constrained-layer-damped leaf-type flexure hinge is established and analyzed.A FE-based mathematical model of the constrained-layer-damped leaf-type flexure hinge is established,and the damping effectiveness of constrained-layer-damped in the leaf-type flexure hinge is verified by simulation.2)A theoretical model of damped circular flexure hinge with integrated comb-like substructures is established and analyzed.This paper develops a novel damped circular hinge with integrated comb-like substructures,and derives a mathematical model of loss factor of the flexure hinge and builds its pseudo-rigid-body model with damping.Based on finite element analysis and experiment analysis,the loss factor of the damped flexure hinge and its mathematic model are verified.The errors of the loss factors from the theoretical model compared to the finite element simulation are analyzed,and their influenced factors are discussed.3)A theoretical model of Piezoelectric shunted damped flexure hinge is established and analyzed.The paper derives a theoretical model of the piezoelectric shunted damped flexure hinge.Based on the analysis of the piezoelectric shunted damped flexure hinge in two different shunt circuits,the optimal values of resistance and inductance are obtained.The damping effect of piezoelectric shunted flexure hinge is verified by simulations and experiments.4)Two kinds of Damped compliant mechanisms: damped flexure-guided stage and locally-resonant-metastructure damped compliant amplification mechanism are designed and analyzed.Considering maximum damping under minimum damping materials,the comb-like substructures in the damped flexure-guided stage are optimized,the optimal values of comb-like substructures parameters are obtained,which can guarantee the performance of optimal damping and response smoothness of the damped flexure-guided stage.Some influence factors on the frequency bandwidth of vibration suppression,such as quantity and layout of the metastructures are discussed preliminarily.