Research On Microscanning Error Correction Theory And Technology For Thermal Microscope Imaging System

The thermal microscope imaging system can observe the shape and temperature of the tiny sample without contacting the measured object.So it has broad application prospect in the fields of biomedicine,scientific research experiment.Early we have developed an optical micro-scanning thermal microscope imaging system,but the system has a large micro-scanning error and requires strictly on the mechanical and optical processing accuracy,which is detrimental to the production and practical of the system.Therefore,a high precision micro-scanner is designed and machined.And the integrated design is realized with the original thermal microscope imaging system.To further correct the micro-scanning error and improve the system spatial resolution,two algorithms to reduce the micro-scanning error are proposed.Firstly,according to the principle of micro-scanning and mechanical design,a new high resolution micro-scanning thermal microscope imaging system is designed.The working principle of the high precision micro-scanner is analyzed.And the parameter design and processing tolerance of the micro-scanner are given.The effectiveness of the design and processing of the system is verified.Secondly,to further correct the micro-scanning error of micro-scanning thermal microscope imaging system,a micro-scanning error correction algorithm based on local gradient is proposed.The simulation and experimental results show that the algorithm improves the image quality,reduces the system micro-scanning error and optimizes the performance of the system.Finally,the method of preprocessing for micro-scanning image is applied to the micro-scanning error correction algorithm.So the micro-scanning error correction algorithm which is based on image preprocessing is proposed.According to two order oversampling method,we can obtain the standard 2×2 micro-scanning images from four non-standard 2×2 micro-scanning images.Then combined with the micro-scanning error correction algorithm based on local gradient,the micro-scanning images are reconstructed and corrected.So the spatial resolution of the system is further improved,and the micro-scanning error is further reduced.In this paper,a new high precision optical micro-scanning thermal microscope imaging system is successfully designed and implemented.The simulation and experimental results show the effectiveness of the overall system design.In order to reduce the micro-scanning error and improve the performance of the system,two micro-scanning error correction algorithms are proposed.The simulation and experimental results show that the algorithms effectively improve the imaging quality and the spatial resolution of the system.The paper has important reference value for the design of high resolution photoelectric imaging system.By further hardware,the micro-scanning thermal microscope imaging system with high resolution,low cost and fast speed has a wide application prospect.