Study And Analysis Of 2DOF Micro-positioning Stage Using Corrugated Flexure Units With Various Curve Segments

Precision positioning technology is widely used in the fields of precision operation,preci-sion manufacturing,precision measurement and so on.It has always been one of the hot research topics around the world.Under this background,stiffness modeling of translational joint based on corrugated flexible unit(CF unit)is carried out in this thesis,leading to the optimization of the stroke and the off-axis/axial stiffness ratio.Besides,the two degree of freedom(DOF)precision positioning stages based on CF units with various curve segments are also designed.Firstly,the stiffness matrix method is employed to modeling the translational joint with CF units,and the Mohr's integral method is applied to model the semi-circle segment.Through the finite element analysis(FEA),the solved stiffness models and errors are verified,and the rela-tionship between the geometric parameters and the planar stiffness,as well as the off-axis/axial stiffness ratio are described with the control variable method,combined with FEA to optimize the design of the CF units.Secondly,conic curve and Bezier curve segments are employed to construct different types of translational joint with CF units.Stiffness models are also established by using the stiffness matrix method.The variable thickness hinge is also studied with the example of double elliptical curve.The stiffness models are all verified through FEA,and the optimal shape parameters of CF unit with various curve segments are obtained.Then,the 2-DOF precision positioning stage based on CF units with various curve segments is constructed.The static and modal characteristics of different CF stages are obtained through FEA.Wire electrical discharge machining(WEDM)is employed to process different types of stages,and the processing precision are detected through micro vision imaging technology.The voice coil motor and corresponding hardware devices are designed and selected,and a 2-DOF precision positioning system is built to test the static performance of different types of precision positioning stages.Through comparison,the 2-DOF stages based on CF units with various curve segments process the characteristics of large ranges and high positioning accuracy.Finally,conclusions and future works are put forward.