Design And Analysis Of A Spatial Six Degree Of Freedom Complaint Micro-positioning Stage

As the speedup of micrometer and nanometer science and technology, the requirement toprecise positioning technology is improving. High accuracy and reliability micro-positioningstage with a large displacement range is strongly required in various fields. A compliantspatial with six degree of freedom micro-positioning stage is introduced, which is actuated byPZT actuator.In order to design and analysis the spatial6dof precision position stage, a combinationof the pseudo-rigid-body-method and finite element method is applied to investigate thecompliant parallel mechanism, which is the transition mechanism of the precision positionstage. First of all, a suitable mechanism is selected as the basic archetype from the traditionalparallel mechanism after a comparison of available options. Kinematic analysis is conductedunder the assumption of small deformation and then two types of flexible joints are chosen toreplace the rigid joints of the6-PSS parallel mechanism, which results the conception designof the compliant parallel mechanism. Based on the original design, size optimization is takenplace in the software of ANSYS-Workbench to ensure a better model.By considering the rigid constrain of position&posture of the platform and the staticequilibrium, the stiffness model of the whole compliant mechanism is obtained from theglobal stiffness models of the kinematic chains of the compliant mechanism, which areestablished by s of the stiffness matrix of the flexure joints. Input stiffness study, couplingdeformation analysis and workspace calculation of the compliant parallel mechanism arepracticed with the help of the stiffness model and simulation results from the software. Anovel compliant displacement amplifier is proposed and its amplify ratio is calculated both bykinematic analysis of rigid mechanism and castigations theorem. Size optimization is alsoused with simulations to ensure the efficiency of this compliant displacement amplifier.Finally, experiments are set up to validate the competence of the design and analysis. Theexperimental results are well matched with results of simulation, which indicates thattheoretical design is effective.