Fabricating Process Optimization For Shell Resonator In Micro Shell Vibrating Gyroscope

Due to its small size,low power consumption and high quality factor,micro-shell resonant gyroscope becomes a new Cariolis vibration gyroscope in recent years,which has been widely researched by world-wide scholars.Resonant structure is the sensitive component in the gyroscope,and its processing technology is the key step in the manufacturing process,which directly determines the performance of the gyroscope.Glassblowing is one of the most potential processing technology with advantages of large processing size,high quality factor and small relative processing error.This paper focuses on improving the quality factor and reducing the frequency split of resonant structure based on glassblowing method.The main contents are as follows:1.The motion equation of the resonant structure based on the ring model is deduced,the motion form of the model under the electrostatic driving force and Coriolis force is solved.The influence of the quality factor and frequency split on the performance of the vibrating gyroscope is analyzed.Finally,the optimization method is proposed.2.The quality factor model of the resonant structure of the micro-shell is analyzed.The finite-element method is used to analyze the frequency split caused by the typical processing errors of the resonant structure,and a method to improve the quality factor and reduce the frequency split is proposed.3.A new machining platform is built to improve the machining efficiency and positioning repeatability.The rotating mechanism in the heating process is introduced,which greatly reduces the asymmetric error in the machining process.At the same time,the processing flow and processing parameters of the resonant structure are optimized.4.The way to enhance the quality factor of shell resonators is analyzed by FEM.The influence of different kinds of metal and thickness of metal layer on the quality factor of resonant structure is verified by experiments.5.The performance of the prototype resonator is tested.The static capacitance is close to the designed value and the consistency is good,which shows that the resonant structure is reliable.The resonant frequency of the typical resonant structure is 6921.2Hz,the quality factor is 13758;the detection mode frequency is 6983.6Hz,the quality factor is 33748,the frequency split is 62.5Hz.Compared with the resonant structure before the improvement,the performance has been greatly improved.