| As a typical power transmission device,linear motor not only achieves power output but also complete precise positioning in various linear feed motions.With the development of high-precision manufacturing industry,there is a higher requirement for real-time on-line high-precision positioning of linear motor.At the same time,with the development of smart manufacturing towards miniaturization and integration,how to achieve integrated high-precision position feedback of linear motor has become a research hotspot.The traditional external linear displacement sensors not only make the whole linear feed system larger and more complex in structure,but also have the disadvantages of complex manufacturing process,high requirement for measuring environment and limited precision by mechanical process and It is difficult to integrate with linear motor in mechanical structure and electrical function into a standard module function group.With the support of the National Natural Science Foundation of China,aiming at the problem that the structure and function of linear motor and traditional position detection sensor are difficult to be integrated designed,this paper proposes a new method based on time grating technology and detecting magnetic field distribution in permanent magnet of linear motor by anisotropic reluctance sensor to achieve realtime on-line accurate position feedback of permanent magnet linear motors,on the basis of not changing the original structure and electric structure of linear motor,the integrated design of sensor unit and linear motor is realized,which has the advantages of low cost,high precision and high integration.The main research work of this subject is as follows:(1)The principle of time grating technology and the working principle of anisotropic magnetoresistance effect were analyzed in detail.Combined with the magnetic field distribution of permanent magnet linear motor,the principle of integrated position detection of linear motor was elaborated and deduced.(2)According to the measurement principle and the structure parameters of linear motor and anisotropic magnetoresistance sensor,the simulation model was established.The distribution of secondary magnetic field of linear motor was analyzed quantitatively.Finally,the embedded parameters of the sensor unit and some error factors were determined.(3)According to the integrated position sensing mechanism of linear motor,the required measurement system was designed,including the hardware and software design of the excitation signal source,the peripheral circuit design of the anisotropic magnetoresistance sensor,the design of the pre-processing circuit and the signal processing system.(4)The experimental platform was built to verify the feasibility.The excitation source,output performance of HMC1022,standing wave and traveling wave signals of sensor unit are tested respectively.The accuracy and stability of the measurement system were tested.Experiments show that the designed integrated position detection system for linear motors has long period original errors between-55?m and 63?m in the measuring range of 250 mm,and stability within 9.533?m,which verifies the correctness and feasibility of the proposed integrated position detection method for linear motors.In summary,through detailed and rigorous theoretical derivation analysis,simulation parameter analysis,design and debugging of test prototype,and experimental research,this paper verifies the correctness and feasibility of the proposed linear motor integrated detection theory with sufficient experimental data,and provides a new method for the research of high-precision linear motor position feedback. |