| With the continuous development of micro-electromechanical systems,microcomponents of various materials are widely used in micro-devices.The size of microcomponent is basically in the micro-nano level,and the micro-component is affected by various factors.Under the micro-size,the mechanical properties of materials will change dramatically.If the macro-parameters of the related materials are used to design the micro-component system,it is difficult to guarantee the parameters and performance of the related indicators.In this paper,micro-beam bending test method is used as the basic theory of micro-component characteristic test,and a loading test device driven by flexible hinges is developed to test the mechanical properties of micro-beam components,which provides a feasible testing method and mechanical characteristics reference for the testing of micro-components with different materials.In this paper,a set of loading and clamping mechanism based on the bending method of micro-beam components is designed,including loading mechanism,clamping mechanism and auxiliary installation mechanism,and relevant research on mechanical design and performance parameters optimization is carried out.The main work is as follows:1)Based on the principle of mechanical property testing and the performance index of the testing system of micro-beam bending method,the design of sensors,actuators and auxiliary mechanisms is carried out on the basis of the overall scheme.2)The design methods of the first stage loading mechanism combined with the flexible leaf spring,the micro-beam loading mechanism combined with the flexible hinge and the specimen clamping mechanism are studied.The stiffness calculation method of the flexible leaf spring mechanism and the stiffness calculation method of the flexible hinge are studied.The structural design model of the two-stage loading mechanism is obtained,and the data simulation will be carried out.The problems existing in the loading and clamping mechanism are analyzed.Then the optimum size of the two-stage loading mechanism and the appropriate size of the clamping mechanism are obtained.Finally,the optimum size of the two-stage loading mechanism to meet the requirements of this paper is obtained.Design scheme.3)The optimum design method of loading mechanism and clamping mechanism is studied from the point of view of energy analysis,and the single factor orthogonal optimization analysis of two-stage flexible hinge mechanism is carried out to obtain the influence of size parameters on the overall magnification.4)The whole testing,installation and debugging of the micro-beam loading and clamping mechanism and the displacement loading experimental platform for the specimens are built.The shape,material,dimension and processing parameters of the tested specimen are given preliminarily,and the related experiments are carried out on the test platform.The parameters of the micro-components,such as angle,modulus of elasticity and flexural strength,are obtained. |
