Design Of Micro-mechanical Bending Loading Mechanism

With the development of micro devices,not only the functional requirements of the design but also the effect of material characteristic parameters on designed parts should be considered when designing the corresponding mechanical micro components.The mechanical property data of the micro component machinery has an important influence on the design of MEMS structure,so a test method for obtaining the mechanical properties of micro component is required.Based on the micro-beam bending method,a set of mechanical measurement system including micro-drive positioning,loading and clamping mechanism with micro-force and micro-displacement measurement is designed.The mechanical properties of micro components containing deformation,strain,elastic modulus and Poisson's ratio can be obtained by this system.A fundamental model for the measurement of mechanical properties of micro component is established,which provides a research foundation for further researches and empolder of high-precision measurement of mechanical properties of micro component.The main contents of this paper include:1.The two-stage and three-stage symmetrical flexible hinge amplification mechanisms are simulated and analysed by ANSYS.The influence law of magnification ratios of different stages on the overall amplification parameters is given.2.The mechanical structure design for bending measurement of micro component is completed,which includes a loading mechanism and a specimen clamping mechanism.The loading mechanism adopts the macro and micro combined two-stage loading method.The rapid approximation is achieved by macro drive,while the required precise displacement feed for bending test is provided by micro drive.The clamping mechanism can effectively realize the accurate positioning and reliable clamping of the designed specimen.3.An experimental platform for the simultaneous measurement of micro force and micro displacement is constructed and preliminary experiments are carried out.